JPS58135600A - プラズマ励起用高周波電力供給装置 - Google Patents

プラズマ励起用高周波電力供給装置

Info

Publication number
JPS58135600A
JPS58135600A JP57017659A JP1765982A JPS58135600A JP S58135600 A JPS58135600 A JP S58135600A JP 57017659 A JP57017659 A JP 57017659A JP 1765982 A JP1765982 A JP 1765982A JP S58135600 A JPS58135600 A JP S58135600A
Authority
JP
Japan
Prior art keywords
plasma
matching
equivalent resistance
output
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57017659A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0243320B2 (zh
Inventor
清 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP57017659A priority Critical patent/JPS58135600A/ja
Publication of JPS58135600A publication Critical patent/JPS58135600A/ja
Publication of JPH0243320B2 publication Critical patent/JPH0243320B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
JP57017659A 1982-02-08 1982-02-08 プラズマ励起用高周波電力供給装置 Granted JPS58135600A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57017659A JPS58135600A (ja) 1982-02-08 1982-02-08 プラズマ励起用高周波電力供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57017659A JPS58135600A (ja) 1982-02-08 1982-02-08 プラズマ励起用高周波電力供給装置

Publications (2)

Publication Number Publication Date
JPS58135600A true JPS58135600A (ja) 1983-08-12
JPH0243320B2 JPH0243320B2 (zh) 1990-09-27

Family

ID=11949968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57017659A Granted JPS58135600A (ja) 1982-02-08 1982-02-08 プラズマ励起用高周波電力供給装置

Country Status (1)

Country Link
JP (1) JPS58135600A (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60205241A (ja) * 1984-03-02 1985-10-16 ザ・パーキン―エルマー・コーポレイション プラズマ放出源
JPS6327034U (zh) * 1986-08-07 1988-02-22
JPH02101744A (ja) * 1988-10-11 1990-04-13 Semiconductor Energy Lab Co Ltd プラズマ反応方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60205241A (ja) * 1984-03-02 1985-10-16 ザ・パーキン―エルマー・コーポレイション プラズマ放出源
JPS6327034U (zh) * 1986-08-07 1988-02-22
JPH02101744A (ja) * 1988-10-11 1990-04-13 Semiconductor Energy Lab Co Ltd プラズマ反応方法

Also Published As

Publication number Publication date
JPH0243320B2 (zh) 1990-09-27

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