JPS58135600A - プラズマ励起用高周波電力供給装置 - Google Patents
プラズマ励起用高周波電力供給装置Info
- Publication number
- JPS58135600A JPS58135600A JP57017659A JP1765982A JPS58135600A JP S58135600 A JPS58135600 A JP S58135600A JP 57017659 A JP57017659 A JP 57017659A JP 1765982 A JP1765982 A JP 1765982A JP S58135600 A JPS58135600 A JP S58135600A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- matching
- equivalent resistance
- output
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57017659A JPS58135600A (ja) | 1982-02-08 | 1982-02-08 | プラズマ励起用高周波電力供給装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57017659A JPS58135600A (ja) | 1982-02-08 | 1982-02-08 | プラズマ励起用高周波電力供給装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58135600A true JPS58135600A (ja) | 1983-08-12 |
JPH0243320B2 JPH0243320B2 (zh) | 1990-09-27 |
Family
ID=11949968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57017659A Granted JPS58135600A (ja) | 1982-02-08 | 1982-02-08 | プラズマ励起用高周波電力供給装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58135600A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60205241A (ja) * | 1984-03-02 | 1985-10-16 | ザ・パーキン―エルマー・コーポレイション | プラズマ放出源 |
JPS6327034U (zh) * | 1986-08-07 | 1988-02-22 | ||
JPH02101744A (ja) * | 1988-10-11 | 1990-04-13 | Semiconductor Energy Lab Co Ltd | プラズマ反応方法 |
-
1982
- 1982-02-08 JP JP57017659A patent/JPS58135600A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60205241A (ja) * | 1984-03-02 | 1985-10-16 | ザ・パーキン―エルマー・コーポレイション | プラズマ放出源 |
JPS6327034U (zh) * | 1986-08-07 | 1988-02-22 | ||
JPH02101744A (ja) * | 1988-10-11 | 1990-04-13 | Semiconductor Energy Lab Co Ltd | プラズマ反応方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0243320B2 (zh) | 1990-09-27 |
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