JPS5813332Y2 - 欠点検出器 - Google Patents

欠点検出器

Info

Publication number
JPS5813332Y2
JPS5813332Y2 JP1976060412U JP6041276U JPS5813332Y2 JP S5813332 Y2 JPS5813332 Y2 JP S5813332Y2 JP 1976060412 U JP1976060412 U JP 1976060412U JP 6041276 U JP6041276 U JP 6041276U JP S5813332 Y2 JPS5813332 Y2 JP S5813332Y2
Authority
JP
Japan
Prior art keywords
light
mirror
optical path
inspected
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976060412U
Other languages
English (en)
Japanese (ja)
Other versions
JPS52150378U (enrdf_load_stackoverflow
Inventor
田仲健治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP1976060412U priority Critical patent/JPS5813332Y2/ja
Publication of JPS52150378U publication Critical patent/JPS52150378U/ja
Application granted granted Critical
Publication of JPS5813332Y2 publication Critical patent/JPS5813332Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1976060412U 1976-05-11 1976-05-11 欠点検出器 Expired JPS5813332Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976060412U JPS5813332Y2 (ja) 1976-05-11 1976-05-11 欠点検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976060412U JPS5813332Y2 (ja) 1976-05-11 1976-05-11 欠点検出器

Publications (2)

Publication Number Publication Date
JPS52150378U JPS52150378U (enrdf_load_stackoverflow) 1977-11-15
JPS5813332Y2 true JPS5813332Y2 (ja) 1983-03-15

Family

ID=28520877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976060412U Expired JPS5813332Y2 (ja) 1976-05-11 1976-05-11 欠点検出器

Country Status (1)

Country Link
JP (1) JPS5813332Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743431A (en) * 1972-05-09 1973-07-03 Philco Ford Corp Radiation sensitive means for detecting flaws in glass

Also Published As

Publication number Publication date
JPS52150378U (enrdf_load_stackoverflow) 1977-11-15

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