JPS5813312Y2 - 感圧装置 - Google Patents

感圧装置

Info

Publication number
JPS5813312Y2
JPS5813312Y2 JP16686876U JP16686876U JPS5813312Y2 JP S5813312 Y2 JPS5813312 Y2 JP S5813312Y2 JP 16686876 U JP16686876 U JP 16686876U JP 16686876 U JP16686876 U JP 16686876U JP S5813312 Y2 JPS5813312 Y2 JP S5813312Y2
Authority
JP
Japan
Prior art keywords
pressure
chip
sensitive element
sensitive
element chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16686876U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5383175U (OSRAM
Inventor
石田勝彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Corp
Original Assignee
Yamaha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaha Corp filed Critical Yamaha Corp
Priority to JP16686876U priority Critical patent/JPS5813312Y2/ja
Publication of JPS5383175U publication Critical patent/JPS5383175U/ja
Application granted granted Critical
Publication of JPS5813312Y2 publication Critical patent/JPS5813312Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP16686876U 1976-12-13 1976-12-13 感圧装置 Expired JPS5813312Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16686876U JPS5813312Y2 (ja) 1976-12-13 1976-12-13 感圧装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16686876U JPS5813312Y2 (ja) 1976-12-13 1976-12-13 感圧装置

Publications (2)

Publication Number Publication Date
JPS5383175U JPS5383175U (OSRAM) 1978-07-10
JPS5813312Y2 true JPS5813312Y2 (ja) 1983-03-15

Family

ID=28774584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16686876U Expired JPS5813312Y2 (ja) 1976-12-13 1976-12-13 感圧装置

Country Status (1)

Country Link
JP (1) JPS5813312Y2 (OSRAM)

Also Published As

Publication number Publication date
JPS5383175U (OSRAM) 1978-07-10

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