JPS58121624A - ＳｉＣ基板へのＰ型不純物拡散方法 - Google Patents
ＳｉＣ基板へのＰ型不純物拡散方法Info
- Publication number
- JPS58121624A JPS58121624A JP57004391A JP439182A JPS58121624A JP S58121624 A JPS58121624 A JP S58121624A JP 57004391 A JP57004391 A JP 57004391A JP 439182 A JP439182 A JP 439182A JP S58121624 A JPS58121624 A JP S58121624A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- amorphous
- type impurity
- impurity diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
- H10D62/8325—Silicon carbide
Landscapes
- Led Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57004391A JPS58121624A (ja) | 1982-01-13 | 1982-01-13 | ＳｉＣ基板へのＰ型不純物拡散方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57004391A JPS58121624A (ja) | 1982-01-13 | 1982-01-13 | ＳｉＣ基板へのＰ型不純物拡散方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58121624A true JPS58121624A (ja) | 1983-07-20 |
| JPH043664B2 JPH043664B2 (OSRAM) | 1992-01-23 |
Family
ID=11583049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57004391A Granted JPS58121624A (ja) | 1982-01-13 | 1982-01-13 | ＳｉＣ基板へのＰ型不純物拡散方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58121624A (OSRAM) |
-
1982
- 1982-01-13 JP JP57004391A patent/JPS58121624A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH043664B2 (OSRAM) | 1992-01-23 |
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