JPS58118439U - フオトマスク - Google Patents

フオトマスク

Info

Publication number
JPS58118439U
JPS58118439U JP1982014869U JP1486982U JPS58118439U JP S58118439 U JPS58118439 U JP S58118439U JP 1982014869 U JP1982014869 U JP 1982014869U JP 1486982 U JP1486982 U JP 1486982U JP S58118439 U JPS58118439 U JP S58118439U
Authority
JP
Japan
Prior art keywords
pattern
photo mask
photomask
metal chromium
main patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982014869U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6220843Y2 (enExample
Inventor
白川　明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP1982014869U priority Critical patent/JPS58118439U/ja
Publication of JPS58118439U publication Critical patent/JPS58118439U/ja
Application granted granted Critical
Publication of JPS6220843Y2 publication Critical patent/JPS6220843Y2/ja
Granted legal-status Critical Current

Links

JP1982014869U 1982-02-04 1982-02-04 フオトマスク Granted JPS58118439U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982014869U JPS58118439U (ja) 1982-02-04 1982-02-04 フオトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982014869U JPS58118439U (ja) 1982-02-04 1982-02-04 フオトマスク

Publications (2)

Publication Number Publication Date
JPS58118439U true JPS58118439U (ja) 1983-08-12
JPS6220843Y2 JPS6220843Y2 (enExample) 1987-05-27

Family

ID=30027322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982014869U Granted JPS58118439U (ja) 1982-02-04 1982-02-04 フオトマスク

Country Status (1)

Country Link
JP (1) JPS58118439U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009086385A (ja) * 2007-09-29 2009-04-23 Hoya Corp フォトマスク及びフォトマスクの製造方法、並びにパターン転写方法
JP2011171465A (ja) * 2010-02-18 2011-09-01 Nuflare Technology Inc 露光用マスクの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009086385A (ja) * 2007-09-29 2009-04-23 Hoya Corp フォトマスク及びフォトマスクの製造方法、並びにパターン転写方法
JP2011171465A (ja) * 2010-02-18 2011-09-01 Nuflare Technology Inc 露光用マスクの製造方法

Also Published As

Publication number Publication date
JPS6220843Y2 (enExample) 1987-05-27

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