JPS58117772U - 液相エピタキシヤル成長用治具 - Google Patents

液相エピタキシヤル成長用治具

Info

Publication number
JPS58117772U
JPS58117772U JP1511282U JP1511282U JPS58117772U JP S58117772 U JPS58117772 U JP S58117772U JP 1511282 U JP1511282 U JP 1511282U JP 1511282 U JP1511282 U JP 1511282U JP S58117772 U JPS58117772 U JP S58117772U
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
support base
phase epitaxial
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1511282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6123010Y2 (enrdf_load_stackoverflow
Inventor
研二 丸山
伊藤　道春
吉河　満男
宏 瀧川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1511282U priority Critical patent/JPS58117772U/ja
Publication of JPS58117772U publication Critical patent/JPS58117772U/ja
Application granted granted Critical
Publication of JPS6123010Y2 publication Critical patent/JPS6123010Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1511282U 1982-02-04 1982-02-04 液相エピタキシヤル成長用治具 Granted JPS58117772U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1511282U JPS58117772U (ja) 1982-02-04 1982-02-04 液相エピタキシヤル成長用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1511282U JPS58117772U (ja) 1982-02-04 1982-02-04 液相エピタキシヤル成長用治具

Publications (2)

Publication Number Publication Date
JPS58117772U true JPS58117772U (ja) 1983-08-11
JPS6123010Y2 JPS6123010Y2 (enrdf_load_stackoverflow) 1986-07-10

Family

ID=30027556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1511282U Granted JPS58117772U (ja) 1982-02-04 1982-02-04 液相エピタキシヤル成長用治具

Country Status (1)

Country Link
JP (1) JPS58117772U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6123010Y2 (enrdf_load_stackoverflow) 1986-07-10

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