JPS58117696A - プラズマ装置 - Google Patents

プラズマ装置

Info

Publication number
JPS58117696A
JPS58117696A JP57000101A JP10182A JPS58117696A JP S58117696 A JPS58117696 A JP S58117696A JP 57000101 A JP57000101 A JP 57000101A JP 10182 A JP10182 A JP 10182A JP S58117696 A JPS58117696 A JP S58117696A
Authority
JP
Japan
Prior art keywords
plasma
anode
magnetic field
electrostatic
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57000101A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0349199B2 (enExample
Inventor
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57000101A priority Critical patent/JPS58117696A/ja
Publication of JPS58117696A publication Critical patent/JPS58117696A/ja
Publication of JPH0349199B2 publication Critical patent/JPH0349199B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57000101A 1982-01-05 1982-01-05 プラズマ装置 Granted JPS58117696A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57000101A JPS58117696A (ja) 1982-01-05 1982-01-05 プラズマ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57000101A JPS58117696A (ja) 1982-01-05 1982-01-05 プラズマ装置

Publications (2)

Publication Number Publication Date
JPS58117696A true JPS58117696A (ja) 1983-07-13
JPH0349199B2 JPH0349199B2 (enExample) 1991-07-26

Family

ID=11464700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57000101A Granted JPS58117696A (ja) 1982-01-05 1982-01-05 プラズマ装置

Country Status (1)

Country Link
JP (1) JPS58117696A (enExample)

Also Published As

Publication number Publication date
JPH0349199B2 (enExample) 1991-07-26

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