JPS58117054U - Sample cooling tilt device in electron microscope - Google Patents
Sample cooling tilt device in electron microscopeInfo
- Publication number
- JPS58117054U JPS58117054U JP1433782U JP1433782U JPS58117054U JP S58117054 U JPS58117054 U JP S58117054U JP 1433782 U JP1433782 U JP 1433782U JP 1433782 U JP1433782 U JP 1433782U JP S58117054 U JPS58117054 U JP S58117054U
- Authority
- JP
- Japan
- Prior art keywords
- inner cylinder
- electron microscope
- sample
- outer cylinder
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本案の一実施例を示すための図、第２図は第１
図におけるＡ−Ａ’断面を示すための図である。
１：試料室、４：外筒、４ａ、 ４ｂ：腕、６：内筒
、７ａ、 ７ｂＨ支持部材、８：試料台、９：軸、１１
：試料、１２：ベローズ、［３：細管、１５：移動筒、
１７ａ、 １７ｂ：連結腕、１９ａ、 １９ｂ：案
内溝、２０：ナツト、２１：モータ、２２：はす両歯車
。Figure 1 is a diagram showing one embodiment of the present proposal, and Figure 2 is a diagram showing an example of the present invention.
It is a figure for showing the AA' cross section in a figure. 1: Sample chamber, 4: Outer tube, 4a, 4b: Arm, 6: Inner tube, 7a, 7bH support member, 8: Sample stage, 9: Shaft, 11
: Sample, 12: Bellows, [3: Thin tube, 15: Moving cylinder,
17a, 17b: connecting arm, 19a, 19b: guide groove, 20: nut, 21: motor, 22: helical gear.
Claims (1)
入可能な外筒と、該外筒の内側に外筒に対して一体的に
設けられた内筒と、前記外筒の先端に取りつけられた軸
の周りに回転可能に取りつけられた試料台と、一端が試
料台の側面゛に取り付けられ他端が前記内筒の先端に取
り付けられたベローズと、冷媒を試料台側面まで導びく
ための流路と該導びかれた冷媒を排出するための流路を
前記内筒内に形成するため内筒を区画するための手段と
、外筒と内筒の間に設けられ外筒に沿って移動可能にさ
れた移動体と、該移動体を鏡筒外から移動させるための
手段と、該移動体の移動を前記試料台の回転に変換する
ため移動体先端と試料台の下端とを連結するための手段
とよりなる電子顕微鏡における試料冷却傾斜装置。An outer cylinder that can be inserted from the atomic direction while maintaining a vacuum in a sample chamber of an electron microscope, an inner cylinder that is provided integrally with the outer cylinder inside the outer cylinder, and an inner cylinder that is attached to the tip of the outer cylinder. a sample stand rotatably mounted around a fixed axis; a bellows having one end attached to the side surface of the sample stand and the other end attached to the tip of the inner cylinder; means for partitioning the inner cylinder to form a flow path for discharging the guided refrigerant in the inner cylinder; a means for moving the moving body from outside the lens barrel; and a means for converting the movement of the moving body into rotation of the sample stage between the tip of the moving body and the lower end of the sample stage. A specimen cooling tilt device in an electron microscope comprising means for coupling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1433782U JPS58117054U (en) | 1982-02-04 | 1982-02-04 | Sample cooling tilt device in electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1433782U JPS58117054U (en) | 1982-02-04 | 1982-02-04 | Sample cooling tilt device in electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58117054U true JPS58117054U (en) | 1983-08-10 |
| JPS6318122Y2 JPS6318122Y2 (en) | 1988-05-23 |
Family
ID=30026807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1433782U Granted JPS58117054U (en) | 1982-02-04 | 1982-02-04 | Sample cooling tilt device in electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58117054U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009117196A (en) * | 2007-11-07 | 2009-05-28 | Jeol Ltd | Barrier membrane type gas atmosphere sample holder |
-
1982
- 1982-02-04 JP JP1433782U patent/JPS58117054U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009117196A (en) * | 2007-11-07 | 2009-05-28 | Jeol Ltd | Barrier membrane type gas atmosphere sample holder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6318122Y2 (en) | 1988-05-23 |
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