JPS58115876A - Silent discharge type gas laser device - Google Patents

Abstract

PURPOSE:To contrive improvement in output of the gas laser device by a method wherein a crystal glass is used as the molding material for a dielectric and the crystal of high dielectric constant is precipitated, thereby enabling to improve a relative permittivity as well as to increase the discharge power density. CONSTITUTION:A high-voltage side metal electrode 2 having the discharge surface is covered by the dielectric 3 consisting of the material such as lead-containing glass, mica or the like. When an AC high voltage is applied to the electrode 2 from a high frequency power source 6 and a transformer 5, a stabilized discharge which is called silent discharge is generated, a laser oscillation is generated in the resonator which is composed of a total reflection mirror 7 and an output-side reflection mirror 8, and a laser beam is outputted from the output reflection mirror. The dielectric constant is improved by precipitating barium titanate to crystal ingredient. The discharge power density can be markedly increase with the electrode 2 using crystal glass. A laser oscillation can be performed at low voltage or a low source frequency, if the power density is the same.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement of a silent discharge type gas laser device. Instead of changing the conventional gas laser device to a horizontally pumped type (a 302 laser will be described).

Figure 1 shows the principle of its construction. (1) is the metal electrode on the ground side, (2) is the metal electrode on the high voltage side, and the discharge surface is a dielectric (3) made of lead-containing glass or (i) mica. covered with
1τ, 2 (4) is the discharge space, (5) is the transformer, (6゛ is the high frequency power supply, (7) is the total reflection mirror, (3) is the output side reflection mirror (partially transparent), (9) is In the above configuration, where cooling water circulation unit f, αQ is a cooler, and all is an ion exchange water purifier, an AC high voltage is applied to the high voltage side electrode (2) by the high frequency power source (6) and the transformer (5). When the voltage is applied, the discharge space (
4) A stable discharge called silent discharge occurs. Since silent discharge is an alternating current discharge with a dielectric (3) e between the two electrodes, it does not shift to arc discharge, and only the electron temperature is high, resulting in a stable non-equilibrium discharge with no increase in molecular temperature. We will omit the explanation of the photoinduced radiation process by excited molecules in the discharge space (4) that can be realized, but when a silent discharge occurs in the discharge space (4), a total reflection mirror (
Laser oscillation occurs in a resonator formed by the output-side reflector (8) and the ground-side electrode (1) and the high-voltage side electrode ( 2) Hatomo 6
ζ Cooling water is cooled with low electrical conductivity, and the cooling water is circulated by a cooling water circulation pump (9) through a cooler Q (1) and an ion exchange water purifier (2). The times reduce the electrical conductivity of the cooling water [, τ high voltage side electrode (
2) In order to prevent current leakage from the laser beam, the gas in the discharge space is flowing at high speed between the electrodes in a direction perpendicular to the laser beam, although it is not shown in the figure.

Figure 2 is an enlarged view of the discharge electrode section, including the ground electrode (1),
The discharge surfaces of both high-voltage electrodes (2) are parallel flat plates, and discharge occurs uniformly between both electrodes, as shown in the figure.

In the example shown in Figure 2, the dielectric was provided on the high voltage electrode side, but it is clear that the same effect can be obtained by providing it on the ground side electrode or on both the high voltage electrode and the ground side electrode. be. Figure Ii8 is an example in which a dielectric material is provided on both the high voltage and ground side electrodes.Since laser oscillation occurs, 1ζ has reflectors (7) and (8).
) laser gain is required in the discharge space to overcome the loss 1ζ, and the laser gain is determined by the length of the discharge space in the optical axis direction and the discharge power density (discharge power input per unit volume)
Therefore, once the length in the optical axis direction is determined, oscillation will not occur unless the discharge power density is increased above the open silver.To increase the discharge power density, Cγ must be set by increasing the frequency of the power supply (or increasing the applied voltage). (Or increase the capacitance of the dielectric material, but it is practical for the power supply frequency to be about 109 kHz at most, and the limit value is high due to the end insulation.) Yes, and the dielectric constant of the dielectric is at most 7.
This invention was made in order to eliminate the above-mentioned drawbacks of the conventional devices, and uses a dielectric molding material of 6ζ crystallized glass to improve the discharge power density. Precipitating crystals with a dielectric constant Eζ improves the relative permittivity of the dielectric and increases the discharge power density ([1,
The aim is to make the output of the cass laser device the same as above.
Embodiment 17 of the present invention will be described below. In this invention, crystallized glass is used as the molding material for the dielectric covering the electrode shown in FIG. Introducing a crystalline component E7 After molding or after coating and baking, annealing is performed to precipitate crystals. 7 Depending on the crystal component introduced, effects such as lower expansion, improved mechanical properties, and improved heat resistance will vary. - In this invention, the crystal component Cζ is precipitated with barium titanate to improve the conductivity. The lζ to obtain the same discharge voltage density as the conventional one using the crystallized glass of this invention is as shown in the following table. If the applied voltage is the same Cζ, the power supply frequency will be about 1/24, and if the power supply frequency is the same, the applied voltage will be 1/4.9.

The relative permittivity of wire-bonded glass varies depending on the type and amount of precipitated crystals.An electrode using crystallized glass with a relative permittivity of 120 has a relative permittivity of 24 compared to the conventionally used feeder material, which has a relative permittivity of 5. The value will be doubled. Therefore, it is possible to significantly increase the discharge power density.If the power density is the same, the voltage is lower.
Alternatively, laser oscillation is possible at a low power supply frequency, for example, in a silent discharge type 〇〇2 gas laser device, when the frequency is several 10 to several IQQ KELz, the discharge power W is the power supply frequency f, and the static electricity of the dielectric of the laser electrode. It is known that there is a proportional relationship C to the capacitance q value. Therefore, electric flA
The discharge power can be increased by increasing the frequency f or the capacitance q of the dielectric.On the other hand, increasing the discharge voltage is also an effective means of increasing the discharge power, but the durability of the insulating material used for the electrodes The electrode structure becomes complicated due to voltage constraints, and the discharge voltage is normally 15 to 2 oKv at most.Also, although it is technically possible to design the power supply frequency f to several 100"I IGh, it is not possible to For,
During power transmission, the loss in cables and connecting conductors is large (due to high frequency skin effect), and the loss inside electrical equipment such as high frequency transformers is large.As a result, the output of the high frequency W source oscillator reaches the discharge electrode. [・, There is a drawback that efficiency decreases, and measures against leakage radio waves are also required.In addition, in the above example, titanate is precipitated in the crystal component, but kneading is performed using other methods. It may be a titanic acid compound (or it may be a niobic acid compound, a zirconic acid compound, a thallium acid compound, or a hafnic acid compound (or O), and -τ is also suitable. Moreover, if the weight percent of the crystal component is in the range of 2 or more and 95 or less, it is believed that the experimental Eζ effect will be obtained.
Since the W-pole Cζ uses a crystallized glass material with high electroconductivity, the capacitance t can be increased, and the power supply frequency can be reduced or lowered to achieve the desired laser gain. Can be compressed,

[Brief explanation of the drawing]

Figure 1 is a configuration diagram showing the principle structure of the laser device, Figure 2
Figures 3 and 3 are enlarged views of different examples of the electrode parts. In the figures, (1) is the ground side electrode, (2) is the high voltage side electrode, (
3) dielectric material, (4) if discharge space, (6) power source, (7) and (8) reflecting mirror. Agent Makoto Kuzuno - Showa year Shinko Director-General of the Japan Patent Office 1, indication of °do f゛1゛ Patent application 1988-2104
44 No. 2, Daymei's name Silent discharge gas laser device, ゛3. Representative of the person making the amendment: Hitoshi Katayama Representative 1: Claims column 1 of the specification to be amended Contents of the amendment: The scope of claims will be amended nine times as shown in the attached sheet. Claims 0) A ground side electrode and a high voltage side electrode; a power source that applies a high voltage between these two electrodes to cause a discharge in the discharge space between the two electrodes; It is equipped with a resonator consisting of a total reflection bell that causes laser oscillation when the laser oscillates and a reflection bell on the laser output side, and at least one of the electrodes has a relative dielectric constant of 6.
A silent discharge type gas laser device characterized in that it is coated with a dielectric material made of the above-mentioned crystallized glass material to generate a silent discharge with high discharge power density in the discharge space. (2) The silent discharge gas laser device according to claim 1, wherein the weight percent of the crystal component of the crystallized glass material is 2 or more and 95 or less. (3) The silent discharge gas laser device according to claim 1, wherein the precipitated crystals of the crystallized glass material are titanium oxide or a titanic acid compound. (4) The silent discharge gas laser device according to claim 1, wherein the precipitated crystals of the crystallized glass material are niobic acid compounds. (5) The silent discharge gas laser device according to claim 1, wherein the precipitated crystals of the crystallized glass material are zirconate compounds. (6) The silent discharge gas laser device according to claim 1, wherein the precipitated crystals of the crystallized glass material are thallium acid compounds. (7) Claim 1, characterized in that the precipitated crystals of the crystallized glass material are hafnic acid compounds.
The silent discharge type gas laser device described in . (8) The precipitated crystals of the crystallized glass material are titanium oxide, a titanic acid compound, or a niobic acid compound. The silent discharge gas laser device according to claim 1, characterized in that it contains two or more of a zirconate compound, a thallium acid compound, and a hafnate compound.

Claims (1)

[Claims] (1) A ground side electrode and a high voltage side electrode, and a sieve between these two electrodes! A power source that applies pressure to cause a discharge in the discharge space between the two electrodes, a position monitor at one end of the discharge space, a total reflection mirror that causes laser oscillation when a discharge occurs, and a resonator that consists of a laser output side reflection mirror A. at least 10,000 of the inner electrode is coated with a dielectric made of a crystallized glass material having a dielectric constant of 6 or more so as to produce a silent discharge with a high discharge power density in the discharge space. (2) The silent discharge gas laser device according to claim 111, wherein the crystallized gas material has a crystal component weight ili% of 2 or more and 95 or less. (3) The silent discharge gas laser device according to claim 1, wherein the precipitated crystals of the crystallized gas material are titanium oxide or a titanic acid compound, (4) The crystallizing power→ A silent discharge gas laser device according to claim 111, characterized in that the precipitated crystals of the sulfur material are a niobic acid compound, (5) the crystallization power→the precipitated crystals of the sulfur material are a zirconate compound; A silent discharge gas laser device according to claim 1, characterized in that: (6) A silent discharge gas laser device according to claim 1, wherein the precipitated crystals of the crystallized glass material are a thallium acid compound, (7) the precipitated crystals of the crystallized glass material are hafnium The silent discharge gas laser device according to claim 1, wherein the laser is an acid compound. (8) Claims characterized in that the precipitated crystals of the crystallized glass material contain two or more of titanium oxide or a titanic acid compound, a niobic acid compound, a zirconic acid compound, a thallium acid compound, and a hafnic acid compound. Silent discharge gas laser device according to item 111,