JPS58115618A - 薄膜磁気ヘツドの研磨方法 - Google Patents

薄膜磁気ヘツドの研磨方法

Info

Publication number
JPS58115618A
JPS58115618A JP56211211A JP21121181A JPS58115618A JP S58115618 A JPS58115618 A JP S58115618A JP 56211211 A JP56211211 A JP 56211211A JP 21121181 A JP21121181 A JP 21121181A JP S58115618 A JPS58115618 A JP S58115618A
Authority
JP
Japan
Prior art keywords
block
signal
lapping
film magnetic
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56211211A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544085B2 (enExample
Inventor
Mitsumasa Oshiki
押木　満雅
Yoshio Koshikawa
越川　誉生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56211211A priority Critical patent/JPS58115618A/ja
Publication of JPS58115618A publication Critical patent/JPS58115618A/ja
Publication of JPH0544085B2 publication Critical patent/JPH0544085B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/048—Lapping machines or devices; Accessories designed for working plane surfaces of sliders and magnetic heads of hard disc drives or the like
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Magnetic Heads (AREA)
JP56211211A 1981-12-28 1981-12-28 薄膜磁気ヘツドの研磨方法 Granted JPS58115618A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56211211A JPS58115618A (ja) 1981-12-28 1981-12-28 薄膜磁気ヘツドの研磨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56211211A JPS58115618A (ja) 1981-12-28 1981-12-28 薄膜磁気ヘツドの研磨方法

Publications (2)

Publication Number Publication Date
JPS58115618A true JPS58115618A (ja) 1983-07-09
JPH0544085B2 JPH0544085B2 (enExample) 1993-07-05

Family

ID=16602156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56211211A Granted JPS58115618A (ja) 1981-12-28 1981-12-28 薄膜磁気ヘツドの研磨方法

Country Status (1)

Country Link
JP (1) JPS58115618A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0453672A (ja) * 1990-06-19 1992-02-21 Sony Corp 薄膜磁気ヘッドの製造方法及び薄膜磁気ヘッドの製造装置
US5993290A (en) * 1997-06-21 1999-11-30 Tdk Corporation Magnetic head grinding method and apparatus
US6217425B1 (en) 1998-06-12 2001-04-17 Tdk Corporation Apparatus and method for lapping magnetic heads
US6322422B1 (en) 1999-01-19 2001-11-27 Nec Corporation Apparatus for accurately measuring local thickness of insulating layer on semiconductor wafer during polishing and polishing system using the same
US6565414B2 (en) 1999-10-25 2003-05-20 Tdk Corporation Polishing apparatus for magnetic head and method therefor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317404A (en) * 1976-08-02 1978-02-17 Dainippon Printing Co Ltd Method of making printing form for inverted halfftone gravure plate making

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317404A (en) * 1976-08-02 1978-02-17 Dainippon Printing Co Ltd Method of making printing form for inverted halfftone gravure plate making

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0453672A (ja) * 1990-06-19 1992-02-21 Sony Corp 薄膜磁気ヘッドの製造方法及び薄膜磁気ヘッドの製造装置
US5993290A (en) * 1997-06-21 1999-11-30 Tdk Corporation Magnetic head grinding method and apparatus
US6217425B1 (en) 1998-06-12 2001-04-17 Tdk Corporation Apparatus and method for lapping magnetic heads
US6322422B1 (en) 1999-01-19 2001-11-27 Nec Corporation Apparatus for accurately measuring local thickness of insulating layer on semiconductor wafer during polishing and polishing system using the same
US6565414B2 (en) 1999-10-25 2003-05-20 Tdk Corporation Polishing apparatus for magnetic head and method therefor

Also Published As

Publication number Publication date
JPH0544085B2 (enExample) 1993-07-05

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