JPS58111942U - Ｌｐｅ膜成長用基板ホルダ - Google Patents

Ｌｐｅ膜成長用基板ホルダ

Info

Publication number
JPS58111942U
JPS58111942U JP923182U JP923182U JPS58111942U JP S58111942 U JPS58111942 U JP S58111942U JP 923182 U JP923182 U JP 923182U JP 923182 U JP923182 U JP 923182U JP S58111942 U JPS58111942 U JP S58111942U
Authority
JP
Japan
Prior art keywords
substrate holder
film growth
substrates
lpe film
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP923182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6226459Y2 (enExample
Inventor
知之 森
坂田　敏夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP923182U priority Critical patent/JPS58111942U/ja
Publication of JPS58111942U publication Critical patent/JPS58111942U/ja
Application granted granted Critical
Publication of JPS6226459Y2 publication Critical patent/JPS6226459Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP923182U 1982-01-26 1982-01-26 Ｌｐｅ膜成長用基板ホルダ Granted JPS58111942U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP923182U JPS58111942U (ja) 1982-01-26 1982-01-26 Ｌｐｅ膜成長用基板ホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP923182U JPS58111942U (ja) 1982-01-26 1982-01-26 Ｌｐｅ膜成長用基板ホルダ

Publications (2)

Publication Number Publication Date
JPS58111942U true JPS58111942U (ja) 1983-07-30
JPS6226459Y2 JPS6226459Y2 (enExample) 1987-07-07

Family

ID=30021884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP923182U Granted JPS58111942U (ja) 1982-01-26 1982-01-26 Ｌｐｅ膜成長用基板ホルダ

Country Status (1)

Country Link
JP (1) JPS58111942U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53157661U (enExample) * 1977-05-17 1978-12-11
JPS5540209U (enExample) * 1978-09-07 1980-03-14

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53157661U (enExample) * 1977-05-17 1978-12-11
JPS5540209U (enExample) * 1978-09-07 1980-03-14

Also Published As

Publication number Publication date
JPS6226459Y2 (enExample) 1987-07-07

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