JPS58111704A - 光学式機械量測定装置 - Google Patents

光学式機械量測定装置

Info

Publication number
JPS58111704A
JPS58111704A JP56215250A JP21525081A JPS58111704A JP S58111704 A JPS58111704 A JP S58111704A JP 56215250 A JP56215250 A JP 56215250A JP 21525081 A JP21525081 A JP 21525081A JP S58111704 A JPS58111704 A JP S58111704A
Authority
JP
Japan
Prior art keywords
image sensor
reflective surface
light
mechanical quantity
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56215250A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6212442B2 (OSRAM
Inventor
Toshitsugu Ueda
敏嗣 植田
Eiji Ogita
英治 荻田
Yutaka Ono
裕 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP56215250A priority Critical patent/JPS58111704A/ja
Publication of JPS58111704A publication Critical patent/JPS58111704A/ja
Publication of JPS6212442B2 publication Critical patent/JPS6212442B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP56215250A 1981-12-25 1981-12-25 光学式機械量測定装置 Granted JPS58111704A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56215250A JPS58111704A (ja) 1981-12-25 1981-12-25 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56215250A JPS58111704A (ja) 1981-12-25 1981-12-25 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS58111704A true JPS58111704A (ja) 1983-07-02
JPS6212442B2 JPS6212442B2 (OSRAM) 1987-03-18

Family

ID=16669198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56215250A Granted JPS58111704A (ja) 1981-12-25 1981-12-25 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS58111704A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6337202A (ja) * 1986-07-31 1988-02-17 Japan Spectroscopic Co 光学的微小変位測定装置
JPS6473254A (en) * 1987-09-14 1989-03-17 Hamamatsu Photonics Kk Measuring apparatus for fast moving object
JP2008002191A (ja) * 2006-06-23 2008-01-10 Toyo Exterior Co Ltd 折板屋根の雨水誘導装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6337202A (ja) * 1986-07-31 1988-02-17 Japan Spectroscopic Co 光学的微小変位測定装置
JPS6473254A (en) * 1987-09-14 1989-03-17 Hamamatsu Photonics Kk Measuring apparatus for fast moving object
JP2008002191A (ja) * 2006-06-23 2008-01-10 Toyo Exterior Co Ltd 折板屋根の雨水誘導装置

Also Published As

Publication number Publication date
JPS6212442B2 (OSRAM) 1987-03-18

Similar Documents

Publication Publication Date Title
US4813782A (en) Method and apparatus for measuring the floating amount of the magnetic head
JPS58191907A (ja) 移動量測定方法
JP4183220B2 (ja) 光学球面曲率半径測定装置
JPS58111704A (ja) 光学式機械量測定装置
US5471302A (en) Interferometric probe for distance measurement utilizing a diffraction reflecting element as a reference surface
US3523732A (en) Active optical ranging device producing multiple source images
JPS62215803A (ja) 測長器
JPS58225304A (ja) 光学式機械量測定装置
SU1397732A1 (ru) Устройство дл измерени тонких стенок стекл нных труб
JPS58111703A (ja) スペックル応用測定装置
JPH0134082Y2 (OSRAM)
SU1388713A1 (ru) Способ измерени угла поворота издели
RU2271014C2 (ru) Способ измерения скорости объекта и устройство для его осуществления
JPS63218827A (ja) 光スペクトル検出装置
SU1695184A1 (ru) Способ определени профил показател преломлени оптических неоднородностей
SU1464046A1 (ru) Устройство дл измерени амплитуды угловых колебаний
JPS59162405A (ja) 光学式機械量測定装置
RU2054626C1 (ru) Устройство измерения продольных и поперечных смещений
SU1397718A1 (ru) Интерферометр дл измерени линейных величин и показател преломлени
GB2236178A (en) Monitoring arrangements
SU1290063A1 (ru) Способ определени изменений угловой координаты объекта в плоскости и устройство дл его осуществлени
SU1076739A1 (ru) Преобразователь линейного перемещени
SU1093978A1 (ru) Оптический доплеровский измеритель градиента скорости потока
SU1651106A1 (ru) Устройство дл измерени параметров колебаний объекта
SU909637A1 (ru) Устройство дл интерферометрического измерени высоких скоростей смещени поверхности