JPS58110487A - Preventing device for transverse movement of pulling shaft in pulling machine for semiconductor - Google Patents

Abstract

PURPOSE:To stably rotate a pulling shaft and to carry out satisfactory pulling by providing guides which enclose the shaft in a rotatable state and can be attached to and detached from the shaft and a guide releasing means to separate the guides. CONSTITUTION:At the beginning of pulling, a gude opening and shutting plate 30 is set at the lowest position. At this time, narrow parts 31, 32, 33 are positioned among guides 26a, 26b, 27a, 27b, 28a, 28b. The guides are shut by means of springs 29, and by pressing the guides against the narrow part of the plate 30 by the spring force, the guides are held at positions which are symmetrical with respect to a pulling shaft 19. The shut guides are slightly opened by hand against the springs 29, and rings 42 are put in the recessed parts 43 and grasped. A seed 22 is then brought into contact with a melt 12 in a crucible 11, and by rotating a frame 15 by a motor 17, the pulling shaft 19 is rotated to grow a single crystal ingot 13. The transverse movement of the shaft 19 is prevented by the guides through the rings 42.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor pulling machine using the Czochralz medium method, and particularly to a pulling machine that uses a flexible material such as a wire or a bead chain as the pulling shaft. This invention relates to an anti-shake device.

The semiconductor pulling machine needs to rotate the pulling shaft at a predetermined speed in order to fully satisfy the oxygen concentration and resistivity distribution characteristics of the pulled single crystal ingot. However, when a pulling shaft made of a removable material is used as described above, the rotation of the pulling shaft is affected by the natural frequency due to the length of the pulling shaft.
There were drawbacks such as resonance occurring within a certain range of rotational speeds, resulting in run-in vibration, and the inability to increase the rotational speed to a desired level.

The present invention solves the above-mentioned drawbacks, suppresses lateral vibration caused by resonance of a pulling shaft made of a flexible material, and
It is an object of the present invention to provide a pulling shaft lateral vibration prevention device in a semiconductor pulling machine that allows stable rotation at a desired speed and good pulling.

1 to 5 showing one embodiment of the present invention will be described below. In Fig. 1 h, 10 is the main body of the pulling machine;
The lower part forms a heating chamber 10m containing a crucible 11 and a heating device (not shown), and the upper part pulls a single crystal inlet 13 from the melt 12 in the crucible 11. A hoisting device 14 is attached to the upper part of the body 10 forming the rounded lifting chamber 10b.A frame 15 of the hoisting device 14 is itself rotatably attached to said body 10. , is configured so that rotation can be applied by the belt 18 from the pulling shaft rotating motor 1r by means of a nine-piece 916 fixed to the lower part thereof. The frame 15 is provided with a hoisting drum 20 for hoisting a pull-up shaft 1g such as a wire bead chain, which is rotated by a hoisting motor 21.

A seed chuck 23 for transferring seeds 22 is attached to the lower end of the pulling shaft 19, and the hanging position of the upper end of the pulling shaft 19 is determined by a fixed guide 24 provided on the frame 15.

Inside the pulling chamber 10b, there is a shaft 2 parallel to the pulling shaft 19.
5 is installed. This shaft 25 has a pair of guides 26as 26b as shown in FIGS. 2 and 3,
and similar guides 27m, 27b, 28a, 2
8b are stacked in multiple sets. Each guide 26m,
26b and the like are attached to the shaft 25 so as to be able to rotate with respect to each other, and are closed by a spring 29.

Said pair of guides 26m, 26b, 21"52rb
A guide opening/closing plate 30 as shown in the fourth section of Seki KFi of 28 m to 28 b is passed through. This guide opening/closing plate 30 has a narrow width part J L32.33 and a wide width part 34, 35, 36 corresponding to the respective guides 26m, 26b, etc., and further has a narrow width part 32.33 and a wide width part 34, 35. It consists of inclined parts 37.3B and 39 leading to the narrow part 31.
．． 32, 33 are located between the respective guides 26a, 126b, etc., the respective guides 26m, 26b, etc. are closed as shown in FIG. 2, and the wide portion 3! , 35.31 are positioned between the respective guides 261, J6b, etc., the respective guides 261.26b, etc. are opened as shown in FIG. As shown in FIG. 1, the guide opening/closing plate 30 is connected to a driving part 40 such as a cylinder and connected to a nine lifting rod 41, and can be set at four positions as shown in the fourth section and zero. ing. Therefore, when the narrow width portion 3H 32.33, the wide width portion 34.35.311Fi, and the guide opening/closing plate 30 are in the position within the fourth section, all the guides 26m, 26b, etc. are closed, @Figure 4 IB ), (
C), (I) and downward guide 2 as it rises sequentially.
They are arranged to open sequentially starting from 6th field and 2εb.

As described above, each guide 217m, job, etc., when closed, grips the cylinder 42, which is engaged with the pulling shaft 19, with the concave portion 43 (see FIG. 3) at the tip, and when opened,
In order not to interfere with the single crystal ingot 13 being pulled up, it is made to be sufficiently far away from the pulling shaft 19 as shown in FIG. Note that the guide 26a, jib, etc.
By positioning the guide opening/closing plate 30 on the straight line connecting the pulling shaft 19 and the shaft 25, it can be opened and closed while being maintained in a symmetrical position with respect to the pulling shaft 19, and the ringay 2 can be opened and closed with respect to the pulling shaft 19. It can be held concentrically.

The ring 42 is rotatably engaged with the pulling shaft 19 with a slight gap, and is also movably engaged along the pulling shaft 19.

Next, the operation of this device will be explained. When starting to pull up, the guide opening/closing plate 30 is placed at the lowest position in the f$4 prisoner area. At this time, there is a narrow part 31.32.33 between the guides 261.26b, 27a, 27b and 28, 211b.
are located, and these guides 26&, 26b, etc. are connected to the spring 29
At the same time as closing the guide 26a126 at this panel
b, etc. to the narrow width portion 1h sz, ss of the guide opening/closing plate 30, and pull up these guides 26a, 126b, etc. to the lifting shaft J9.
Hold it in a symmetrical position. The guides 26m, 26b, etc., which have been closed as described above, are slightly opened by hand against the spring 29, and the ring 42, which has been previously engaged with the pulling shaft 19, is inserted into the recess 43 and gripped.

Next, the seed 22 is brought into contact with the melt 12 in the crucible 11, and the frame 15 is rotated by the pulling shaft rotation motor 17 to rotate the pulling shaft 19, thereby growing the single crystal ingot 1s. The pulling shaft 19 is connected to each ring 4
Lateral vibration is prevented by guides 26m, 26b, etc. via 2.

The resonant frequency f of the pulling shaft 19 is expressed by the following equation, and R in this equation (1) is determined by the actual pulling shaft 19 in the seed chuck 731 from the support against lateral vibration of the guides 26m, 26b, etc. It is not the length, but the distance from the fulcrum to the center of gravity position G including the seed chuck 23, seed 22, and single crystal ingot 13. However, (g in equation 11 is the gravitational acceleration.

Therefore, there is no guide 26, 26b, etc. as described above,
When the pulling shaft 19 is simply held by the fixed guide 24 at the upper end, the length l is the longest at the start of pulling and gradually becomes shorter as the pulling progresses, so that the pulling shaft 19 corresponds to the resonant frequency f. The t/f8 rotation speed of the upper shaft 19 is the 5th
As shown by curve A in the figure, the rotational speed Nm at the start of pulling is kept very low.

However, according to the present device, the guide 26 at the lowest position
By installing a and 26b relatively close to the surface of the melt 12, 1 in equation 11 can be made considerably smaller at the start of pulling.
As shown in , the allowable rotational speed at the start of pulling can be greatly increased from N1 in the case of IA to N as shown in . The above l becomes gradually shorter as the center of gravity position G rises as the pulling progresses, and therefore the permissible rotational speed increases by 1 as shown by the above curve B.

As the pulling progresses, the seed chuck 23 moves to the guides 26m and 2.
6b, this is detected by a detection means such as a pull-up length detection device (not shown), and the drive unit 40 is operated to move the guide opening/closing plate 30 to the distance @ S
, only to rise. As the guide opening/closing plate 30 rises, the guides 26a and 26b are caused to spring 29 by the inclined portion 31.
As shown in FIG.
It is kept open. At this time, the ring 42 falls onto the sheet chuck 23, which has risen to just below it, and is held there.

When the guides 26m and 26b open in this way, the pulling shaft 19
is the guide 27a located above it.

It will be held at 2rb. Therefore, 1 in formula C11 is long 9, so the allowable rotation speed is N on curve B.
, it decreases by a predetermined amount as shown by .

At this time, the center of gravity is located at 1i11 with respect to the seed chuck 23.
The distance from the guides 21m and 21b to the rear chuck 21, where G is moving downward from when the pulling started, is
Even if the distance is set equal to the distance from the guide 26a126b to the seed chuck 23 at the start of pulling, the distance will be longer than at the start of pulling, and therefore the allowable rotation speed N is
.

slightly lower.

The seed chuck 23 and the black crystal ingot 13 rise further as the pulling progresses, but since the guides 26m and 26b at the lowest positions are opened as described above, they are pulled up without interfering with them. .

In this way, the seed chuck 23 is placed in the middle guide 27m,
21b, the guide opening/closing plate 30 is moved by the drive unit 40 to a position a distance S above the lowest position as shown in FIG. It opens by the wide part 35. Similarly, when the seed chuck 23 approaches the uppermost guides 2Bm and 21b, the guide opening/closing plate 30 rises by distances S and t as shown in FIG. Inclined part 3
9 and the wide portion 36, allowing the pulling shaft 19 to be pulled up to 1 height.

Therefore, according to the present device, by installing a plurality of guides 261, xsb, etc. with an appropriately determined interval C, papermaking,
The hold can be held sufficiently short regardless of the lifting length, and the common gripping frequency of the lifting shaft 19 determined by this 1 can be greatly increased. For this reason, the pulling shaft 1
It becomes possible to maintain a sufficient number of rotations of 90 rotations, and pulling can be carried out most preferably for the pulling conditions such as satisfying the distribution characteristics of the crystallinity and resistivity of the single crystal ingot 13 to be grown.

In the embodiment described above, the pulling shaft 19 is guided through the ring 42 which is previously engaged with the pulling shaft 19.
tb, etc.) to show a precedent, guides 2 #maro, Jgb, etc. may be used to directly surround the pulling shaft 19;
For opening and closing, various known driving means can be used instead of using the guide opening/closing plate 3o as shown in the figure.Furthermore, the guide is not dependent on the symmetrical opening/closing method as shown in the figure, but can be opened and closed with respect to the pulling shaft 19. It goes without saying that various modifications can be made, such as providing a device that can be engaged and detached from the pull-up shaft 19 and moved away from the pulling shaft 19.

As described above, according to the present invention, it is possible to suppress the lateral vibration of the pulling shaft made of a flexible material due to resonance etc. to a smaller extent throughout the period from the start of pulling to the end of pulling. In addition to being able to stably rotate the machine at the desired speed and perform good pulling, each guide only opens and closes at a predetermined position, so the height of the pulling machine can be increased. You can get the effect of a bun without having to do it.

[Brief explanation of the drawing]

Figure fa1 is a partially cutaway schematic diagram showing one embodiment of the present invention, Figure 2 is a partially enlarged sectional view taken along line 1-1 in Figure 1, and Figure 3 is a state in which the guide shown in Figure 2 is open. Figure 5 shows the relationship between the pulling length and the permissible rotational speed of the pulling shaft. FIG. IO...pulling machine main body, 10 m...heating chamber,
IOb...lifting chip, 11...crucible, 13...
・Single crystal ingot, 14... winding device, 19...
Pulling shaft, 22... Seed% 23... Seed chuck, 25... Axis, 26a, J6b, 271.27b,
jt8ah2ab...Guide, 29...Spring, 3o
...Guide opening/closing plate, 40...Drive unit, 41...Elevating rod. Applicant's agent Patent attorney Suzue TakehikoJI1 Figure 41I (A) (B) (C) (D) 1
51f Pull J-! - Continued from page 10 Inventor Asaji Yonabe 378 Oguni-cho, Oguni-machi, Nishiokitama-gun, Yamagata Prefecture Oguni-cho, Toshiba Ceramic Corporation 0 Inventor Toshiba Hasebe 78 Oguni-cho, Oguni-machi, Nishiokitama-gun, Yamagata Prefecture Toshiba Ceramics Co., Ltd. Oguni Factory ■Applicant: Toshiba Ceramics Co., Ltd. 1-26-2 Nishi-Shinjuku, Shinjuku-ku, Tokyo

Claims (1)

[Claims] (11) In a semiconductor pulling machine using a flexible material as a pulling shaft, a plurality of semiconductor pulling machines are arranged along the pulling shaft and rotatably surround the pulling shaft directly or indirectly. In addition, a guide is provided to be detachably connected to the pulling shaft, and a guide releasing means is provided for sequentially disengaging the guide from the lower guide as the pulling shaft is pulled up and away from the pulling shaft. A device for preventing lateral vibration of a pulling shaft in a semiconductor pulling machine, characterized in that the guide 21 is formed to be able to open and close symmetrically with respect to the pulling shaft. A device to prevent horizontal vibration of the pulling shaft in a machine.