JPS579864A - Method and apparatus for automatically detecting concentration of anion in chemical copper plating solution - Google Patents

Method and apparatus for automatically detecting concentration of anion in chemical copper plating solution

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Publication number
JPS579864A
JPS579864A JP8145480A JP8145480A JPS579864A JP S579864 A JPS579864 A JP S579864A JP 8145480 A JP8145480 A JP 8145480A JP 8145480 A JP8145480 A JP 8145480A JP S579864 A JPS579864 A JP S579864A
Authority
JP
Japan
Prior art keywords
soln
current
dialytic
chemical copper
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8145480A
Other languages
Japanese (ja)
Inventor
Hiroshi Kikuchi
Hitoshi Oka
Ataru Yokono
Haruo Suzuki
Toyofusa Yoshimura
Akira Matsuo
Osamu Miyazawa
Isamu Tanaka
Tokio Isogai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8145480A priority Critical patent/JPS579864A/en
Publication of JPS579864A publication Critical patent/JPS579864A/en
Pending legal-status Critical Current

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  • Chemically Coating (AREA)
  • Control Of Non-Electrical Variables (AREA)

Abstract

PURPOSE: To detect continuously and automatically anions accumulated in a chemical copper soln. to cause deterioration of the soln. by introducing the soln. into the desalting chamber of an electrodialytic tank divided with cation and anion exchange membranes and measuring the dialytic current.
CONSTITUTION: A chemical copper plating soln. is introduced into the desalting chamber 6 of an electrodialytic tank 2 divided with a cation exchange membrane 3 and an anion exchange membrane 4 at a constant rate. The soln. is dialyzed at a constant voltage with an external power source 9, and the dialytic current is measured with an ammeter 10. This dialytic current relates to accumulated ions permeating the membrane 4, and as the amount of anions is increased, the current value rises. On the basis of the relation by comparing the dialytic current to a set value, the concn. of formate ions, sulfate ions and carbonate ions accumulated in the plating soln. can be detected easily.
COPYRIGHT: (C)1982,JPO&Japio
JP8145480A 1980-06-18 1980-06-18 Method and apparatus for automatically detecting concentration of anion in chemical copper plating solution Pending JPS579864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8145480A JPS579864A (en) 1980-06-18 1980-06-18 Method and apparatus for automatically detecting concentration of anion in chemical copper plating solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8145480A JPS579864A (en) 1980-06-18 1980-06-18 Method and apparatus for automatically detecting concentration of anion in chemical copper plating solution

Publications (1)

Publication Number Publication Date
JPS579864A true JPS579864A (en) 1982-01-19

Family

ID=13746843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8145480A Pending JPS579864A (en) 1980-06-18 1980-06-18 Method and apparatus for automatically detecting concentration of anion in chemical copper plating solution

Country Status (1)

Country Link
JP (1) JPS579864A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0182102A2 (en) * 1984-10-22 1986-05-28 International Business Machines Corporation Method of determining the amount of an anionic material
WO2022195093A1 (en) * 2021-03-19 2022-09-22 GUGGENBERGER, Leonid Analysis system for the determination of ions in an ion-containing liquid medium, and an analysis process performed with the analysis system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0182102A2 (en) * 1984-10-22 1986-05-28 International Business Machines Corporation Method of determining the amount of an anionic material
WO2022195093A1 (en) * 2021-03-19 2022-09-22 GUGGENBERGER, Leonid Analysis system for the determination of ions in an ion-containing liquid medium, and an analysis process performed with the analysis system

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