JPS5793826A - Basket automatic transporter - Google Patents
Basket automatic transporterInfo
- Publication number
- JPS5793826A JPS5793826A JP16923580A JP16923580A JPS5793826A JP S5793826 A JPS5793826 A JP S5793826A JP 16923580 A JP16923580 A JP 16923580A JP 16923580 A JP16923580 A JP 16923580A JP S5793826 A JPS5793826 A JP S5793826A
- Authority
- JP
- Japan
- Prior art keywords
- basket
- belt
- transporting means
- contg
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Specific Conveyance Elements (AREA)
Abstract
PURPOSE: To automatically supply and discharge a basket by disposing basket transporting means respectively on both left and right sides and behind a check device of a semiconductor manufacturing process, and transferring the basket on the rear transporting means to the right and left transporting means by a robot.
CONSTITUTION: A basket 3 contg. untreated wafers 2A is stopped by basket transporting means 6 at a take-out position of a loader basket storing apparatus 5A, and a loader transport robot 7A moves to grasp the basket 3 and transfer it to a belt 8. The basket 3 is moved to this side of a check device 1 by the belt 8. The basket 3 contg. checked wafers is placed on a belt 8 on a storing apparatus 5B and put on a basket transporting apparatus 6 by the belt 8, and a loader transport robot 7B. Thus, a basket for contg. wafers before and after treatment can be automatically supplied and discharged.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16923580A JPS5793826A (en) | 1980-11-28 | 1980-11-28 | Basket automatic transporter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16923580A JPS5793826A (en) | 1980-11-28 | 1980-11-28 | Basket automatic transporter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5793826A true JPS5793826A (en) | 1982-06-11 |
Family
ID=15882731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16923580A Pending JPS5793826A (en) | 1980-11-28 | 1980-11-28 | Basket automatic transporter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5793826A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106340476A (en) * | 2016-08-26 | 2017-01-18 | 温州市赛拉弗能源有限公司 | Full-automatic silicon chip mounting machine |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5134192A (en) * | 1974-08-07 | 1976-03-23 | Bristol Myers Co | Sefuamandoorunoseiho |
JPS5231975A (en) * | 1975-09-08 | 1977-03-10 | Nippon Nousan Kogyo Kk | Gas-liquid contact method and its apparatus |
-
1980
- 1980-11-28 JP JP16923580A patent/JPS5793826A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5134192A (en) * | 1974-08-07 | 1976-03-23 | Bristol Myers Co | Sefuamandoorunoseiho |
JPS5231975A (en) * | 1975-09-08 | 1977-03-10 | Nippon Nousan Kogyo Kk | Gas-liquid contact method and its apparatus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106340476A (en) * | 2016-08-26 | 2017-01-18 | 温州市赛拉弗能源有限公司 | Full-automatic silicon chip mounting machine |
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