JPS5793826A - Basket automatic transporter - Google Patents

Basket automatic transporter

Info

Publication number
JPS5793826A
JPS5793826A JP16923580A JP16923580A JPS5793826A JP S5793826 A JPS5793826 A JP S5793826A JP 16923580 A JP16923580 A JP 16923580A JP 16923580 A JP16923580 A JP 16923580A JP S5793826 A JPS5793826 A JP S5793826A
Authority
JP
Japan
Prior art keywords
basket
belt
transporting means
contg
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16923580A
Other languages
Japanese (ja)
Inventor
Michifumi Ite
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP16923580A priority Critical patent/JPS5793826A/en
Publication of JPS5793826A publication Critical patent/JPS5793826A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To automatically supply and discharge a basket by disposing basket transporting means respectively on both left and right sides and behind a check device of a semiconductor manufacturing process, and transferring the basket on the rear transporting means to the right and left transporting means by a robot.
CONSTITUTION: A basket 3 contg. untreated wafers 2A is stopped by basket transporting means 6 at a take-out position of a loader basket storing apparatus 5A, and a loader transport robot 7A moves to grasp the basket 3 and transfer it to a belt 8. The basket 3 is moved to this side of a check device 1 by the belt 8. The basket 3 contg. checked wafers is placed on a belt 8 on a storing apparatus 5B and put on a basket transporting apparatus 6 by the belt 8, and a loader transport robot 7B. Thus, a basket for contg. wafers before and after treatment can be automatically supplied and discharged.
COPYRIGHT: (C)1982,JPO&Japio
JP16923580A 1980-11-28 1980-11-28 Basket automatic transporter Pending JPS5793826A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16923580A JPS5793826A (en) 1980-11-28 1980-11-28 Basket automatic transporter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16923580A JPS5793826A (en) 1980-11-28 1980-11-28 Basket automatic transporter

Publications (1)

Publication Number Publication Date
JPS5793826A true JPS5793826A (en) 1982-06-11

Family

ID=15882731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16923580A Pending JPS5793826A (en) 1980-11-28 1980-11-28 Basket automatic transporter

Country Status (1)

Country Link
JP (1) JPS5793826A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106340476A (en) * 2016-08-26 2017-01-18 温州市赛拉弗能源有限公司 Full-automatic silicon chip mounting machine

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134192A (en) * 1974-08-07 1976-03-23 Bristol Myers Co Sefuamandoorunoseiho
JPS5231975A (en) * 1975-09-08 1977-03-10 Nippon Nousan Kogyo Kk Gas-liquid contact method and its apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134192A (en) * 1974-08-07 1976-03-23 Bristol Myers Co Sefuamandoorunoseiho
JPS5231975A (en) * 1975-09-08 1977-03-10 Nippon Nousan Kogyo Kk Gas-liquid contact method and its apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106340476A (en) * 2016-08-26 2017-01-18 温州市赛拉弗能源有限公司 Full-automatic silicon chip mounting machine

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