JPS5789486A - Washing and drying method - Google Patents
Washing and drying methodInfo
- Publication number
- JPS5789486A JPS5789486A JP16699980A JP16699980A JPS5789486A JP S5789486 A JPS5789486 A JP S5789486A JP 16699980 A JP16699980 A JP 16699980A JP 16699980 A JP16699980 A JP 16699980A JP S5789486 A JPS5789486 A JP S5789486A
- Authority
- JP
- Japan
- Prior art keywords
- vessel
- article
- water
- cleaning solution
- dewatering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005406 washing Methods 0.000 title abstract 2
- 238000001035 drying Methods 0.000 title 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 6
- 238000004140 cleaning Methods 0.000 abstract 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 5
- 230000008016 vaporization Effects 0.000 abstract 3
- 238000009834 vaporization Methods 0.000 abstract 3
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 2
- 239000003960 organic solvent Substances 0.000 abstract 2
- 230000001464 adherent effect Effects 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16699980A JPS5789486A (en) | 1980-11-26 | 1980-11-26 | Washing and drying method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16699980A JPS5789486A (en) | 1980-11-26 | 1980-11-26 | Washing and drying method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5789486A true JPS5789486A (en) | 1982-06-03 |
| JPS6128034B2 JPS6128034B2 (enrdf_load_stackoverflow) | 1986-06-28 |
Family
ID=15841495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16699980A Granted JPS5789486A (en) | 1980-11-26 | 1980-11-26 | Washing and drying method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5789486A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60121287A (ja) * | 1983-12-05 | 1985-06-28 | Daikin Ind Ltd | ホツトメルト加工品の洗浄方法 |
| JPS60125282A (ja) * | 1983-12-13 | 1985-07-04 | 有限会社タス技術研究所 | 無塵洗浄乾燥装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936867A (enrdf_load_stackoverflow) * | 1972-08-23 | 1974-04-05 | ||
| JPS52137756U (enrdf_load_stackoverflow) * | 1976-04-14 | 1977-10-19 |
-
1980
- 1980-11-26 JP JP16699980A patent/JPS5789486A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936867A (enrdf_load_stackoverflow) * | 1972-08-23 | 1974-04-05 | ||
| JPS52137756U (enrdf_load_stackoverflow) * | 1976-04-14 | 1977-10-19 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60121287A (ja) * | 1983-12-05 | 1985-06-28 | Daikin Ind Ltd | ホツトメルト加工品の洗浄方法 |
| JPS60125282A (ja) * | 1983-12-13 | 1985-07-04 | 有限会社タス技術研究所 | 無塵洗浄乾燥装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6128034B2 (enrdf_load_stackoverflow) | 1986-06-28 |
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