JPS5787135A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS5787135A
JPS5787135A JP55163794A JP16379480A JPS5787135A JP S5787135 A JPS5787135 A JP S5787135A JP 55163794 A JP55163794 A JP 55163794A JP 16379480 A JP16379480 A JP 16379480A JP S5787135 A JPS5787135 A JP S5787135A
Authority
JP
Japan
Prior art keywords
sio23
in2o32
etching
layer
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55163794A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0117246B2 (Direct
Inventor
Hajime Takesada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd, Sanyo Denki Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP55163794A priority Critical patent/JPS5787135A/ja
Publication of JPS5787135A publication Critical patent/JPS5787135A/ja
Publication of JPH0117246B2 publication Critical patent/JPH0117246B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
JP55163794A 1980-11-20 1980-11-20 Manufacture of semiconductor Granted JPS5787135A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55163794A JPS5787135A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55163794A JPS5787135A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor

Publications (2)

Publication Number Publication Date
JPS5787135A true JPS5787135A (en) 1982-05-31
JPH0117246B2 JPH0117246B2 (Direct) 1989-03-29

Family

ID=15780821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55163794A Granted JPS5787135A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS5787135A (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61134070A (ja) * 1984-12-05 1986-06-21 Matsushita Electric Ind Co Ltd 薄膜トランジスタアレイ
JP2009088098A (ja) * 2007-09-28 2009-04-23 Sharp Corp 誘電体膜のパターニング方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61134070A (ja) * 1984-12-05 1986-06-21 Matsushita Electric Ind Co Ltd 薄膜トランジスタアレイ
JP2009088098A (ja) * 2007-09-28 2009-04-23 Sharp Corp 誘電体膜のパターニング方法

Also Published As

Publication number Publication date
JPH0117246B2 (Direct) 1989-03-29

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