JPS5780740A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5780740A JPS5780740A JP15653180A JP15653180A JPS5780740A JP S5780740 A JPS5780740 A JP S5780740A JP 15653180 A JP15653180 A JP 15653180A JP 15653180 A JP15653180 A JP 15653180A JP S5780740 A JPS5780740 A JP S5780740A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wiring
- aluminum
- semiconductor device
- wiring layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent the junction breakdown due to metallic diffusion in a semiconductor device by forming the first wiring layer of metal of high purity for an impurity layer on an Si substrate and superposing the second wiring layer of the metal-Si alloy thereon, thereby maintaining preferable contact therebetween. CONSTITUTION:A wiring layer 8 of Al-Si alloy containing approx. 1% of Si is sputtered via a thin aluminum film 7 of high purity on the N<+> type layer 2 of a P type Si substrate 1. According to this configuration, after the aluminum is diffused to certain degree to the layer 2, it does not diffuse any more, and according no junction breakdown occurs. Since the aluminum and silicon are alloyed to certain degree, the contacting resistance between the wiring tuber and the layer 2 can be maintained low.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15653180A JPS5780740A (en) | 1980-11-07 | 1980-11-07 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15653180A JPS5780740A (en) | 1980-11-07 | 1980-11-07 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5780740A true JPS5780740A (en) | 1982-05-20 |
Family
ID=15629821
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15653180A Pending JPS5780740A (en) | 1980-11-07 | 1980-11-07 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5780740A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5135280A (en) * | 1974-09-20 | 1976-03-25 | Hitachi Ltd | HANDOTA ISOCHI |
-
1980
- 1980-11-07 JP JP15653180A patent/JPS5780740A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5135280A (en) * | 1974-09-20 | 1976-03-25 | Hitachi Ltd | HANDOTA ISOCHI |
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