JPS5780503A - Electrostatic capacity type distance measuring apparatus - Google Patents

Electrostatic capacity type distance measuring apparatus

Info

Publication number
JPS5780503A
JPS5780503A JP55157807A JP15780780A JPS5780503A JP S5780503 A JPS5780503 A JP S5780503A JP 55157807 A JP55157807 A JP 55157807A JP 15780780 A JP15780780 A JP 15780780A JP S5780503 A JPS5780503 A JP S5780503A
Authority
JP
Japan
Prior art keywords
plate
electrodes
movement
shaft
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55157807A
Other languages
English (en)
Inventor
Hiroaki Tanaka
Shigeyuki Akita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soken Inc
Original Assignee
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc filed Critical Nippon Soken Inc
Priority to JP55157807A priority Critical patent/JPS5780503A/ja
Priority to US06/318,856 priority patent/US4423417A/en
Priority to DE19813144506 priority patent/DE3144506A1/de
Publication of JPS5780503A publication Critical patent/JPS5780503A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/001—Constructional details of gauge heads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP55157807A 1980-11-10 1980-11-10 Electrostatic capacity type distance measuring apparatus Pending JPS5780503A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP55157807A JPS5780503A (en) 1980-11-10 1980-11-10 Electrostatic capacity type distance measuring apparatus
US06/318,856 US4423417A (en) 1980-11-10 1981-11-06 Capacitance type distance detecting apparatus
DE19813144506 DE3144506A1 (de) 1980-11-10 1981-11-09 "kapazitive wegstrecken-messeinrichtung"

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55157807A JPS5780503A (en) 1980-11-10 1980-11-10 Electrostatic capacity type distance measuring apparatus

Publications (1)

Publication Number Publication Date
JPS5780503A true JPS5780503A (en) 1982-05-20

Family

ID=15657710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55157807A Pending JPS5780503A (en) 1980-11-10 1980-11-10 Electrostatic capacity type distance measuring apparatus

Country Status (3)

Country Link
US (1) US4423417A (ja)
JP (1) JPS5780503A (ja)
DE (1) DE3144506A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053183A (ja) * 2007-07-31 2009-03-12 Kyocera Corp ステージの位置変動検出装置およびこれを備えた搬送装置
JP2009288058A (ja) * 2008-05-29 2009-12-10 Kyocera Corp ステージの位置変動検出装置およびこれを備えた搬送装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038221Y2 (ja) * 1981-01-22 1985-11-14 株式会社日本自動車部品総合研究所 静電容量式回転検出器
JPS57148262A (en) * 1981-03-09 1982-09-13 Nippon Soken Inc Detecting device for rotating direction
US4499465A (en) * 1981-03-18 1985-02-12 Nippon Soken, Inc. Capacitive-type incremental and reference angular rotation detecting apparatus
US4606008A (en) * 1983-07-25 1986-08-12 Cain Encoder Company Angular position detector
US4522517A (en) * 1983-11-10 1985-06-11 Wade Kenneth B Encoder system for dot matrix line printer
JPS60257307A (ja) * 1984-06-01 1985-12-19 Nippon Soken Inc ハンドル回転検出装置
JPS6168805U (ja) * 1984-10-08 1986-05-12
US4567410A (en) * 1984-12-03 1986-01-28 Continental Can Company, Inc. Capacitive article density monitor
US4794393A (en) * 1986-08-22 1988-12-27 Imran Mir A Device for measuring parameters on electrocardiogram strip recordings
US4742244A (en) * 1986-10-15 1988-05-03 Itt Avionics Electronic float switch apparatus
DE3729021A1 (de) * 1987-08-31 1989-03-16 Messerschmitt Boelkow Blohm Ausloesevorrichtung fuer sicherheitssysteme
DE3740544C2 (de) * 1987-11-30 1999-08-12 Neutron Mikroelektronik Gmbh Einrichtung zur Wandlung einer Weg- oder Winkelgröße in eine elektrische inkrementale oder digitale Größe

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3355806A (en) * 1964-03-02 1967-12-05 Bendix Corp Test standard device for discrete angle values
US3702467A (en) * 1971-11-23 1972-11-07 Ibm Shaft position sensing device
US3961318A (en) * 1975-01-17 1976-06-01 Inductosyn Corporation Electrostatic position-measuring transducer
SE394822B (sv) * 1975-04-15 1977-07-11 Kamyr Ab Sett och anordning for avvattning av suspensioner i rorelse

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053183A (ja) * 2007-07-31 2009-03-12 Kyocera Corp ステージの位置変動検出装置およびこれを備えた搬送装置
JP2009288058A (ja) * 2008-05-29 2009-12-10 Kyocera Corp ステージの位置変動検出装置およびこれを備えた搬送装置

Also Published As

Publication number Publication date
DE3144506A1 (de) 1982-08-26
US4423417A (en) 1983-12-27

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