JPS5779417A - Temperature measuring device - Google Patents
Temperature measuring deviceInfo
- Publication number
- JPS5779417A JPS5779417A JP15497880A JP15497880A JPS5779417A JP S5779417 A JPS5779417 A JP S5779417A JP 15497880 A JP15497880 A JP 15497880A JP 15497880 A JP15497880 A JP 15497880A JP S5779417 A JPS5779417 A JP S5779417A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- beams
- voltage signal
- change
- incident
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/12—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/02—Means for indicating or recording specially adapted for thermometers
- G01K1/024—Means for indicating or recording specially adapted for thermometers for remote indication
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15497880A JPS5779417A (en) | 1980-11-04 | 1980-11-04 | Temperature measuring device |
PCT/JP1981/000318 WO1982001588A1 (en) | 1980-11-04 | 1981-11-04 | Temperature measuring apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15497880A JPS5779417A (en) | 1980-11-04 | 1980-11-04 | Temperature measuring device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5779417A true JPS5779417A (en) | 1982-05-18 |
Family
ID=15596027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15497880A Pending JPS5779417A (en) | 1980-11-04 | 1980-11-04 | Temperature measuring device |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS5779417A (ja) |
WO (1) | WO1982001588A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002033369A1 (en) * | 2000-10-13 | 2002-04-25 | Tokyo Electron Limited | Apparatus for measuring temperatures of a wafer using specular reflection spectroscopy |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1198706B (it) * | 1983-10-18 | 1988-12-21 | Consiglio Nazionale Ricerche | Sensore di temperatura a fibra ottica ad effetto termocormico |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54158954A (en) * | 1978-06-02 | 1979-12-15 | Asea Ab | Device for measuring fiber optical |
JPS5566097A (en) * | 1978-11-13 | 1980-05-19 | Fujitsu Ltd | Optical system analog quantity detecting circuit |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5462879A (en) * | 1977-10-28 | 1979-05-21 | Mitsubishi Electric Corp | Optical temperature detector |
SE418997B (sv) * | 1978-06-26 | 1981-07-06 | Asea Ab | Fiberoptisk temeraturgivare baserad pa metning av den temperaturberoende, spektrala absorptionsformagan hos ett material |
-
1980
- 1980-11-04 JP JP15497880A patent/JPS5779417A/ja active Pending
-
1981
- 1981-11-04 WO PCT/JP1981/000318 patent/WO1982001588A1/ja unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54158954A (en) * | 1978-06-02 | 1979-12-15 | Asea Ab | Device for measuring fiber optical |
JPS5566097A (en) * | 1978-11-13 | 1980-05-19 | Fujitsu Ltd | Optical system analog quantity detecting circuit |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002033369A1 (en) * | 2000-10-13 | 2002-04-25 | Tokyo Electron Limited | Apparatus for measuring temperatures of a wafer using specular reflection spectroscopy |
US7234862B2 (en) | 2000-10-13 | 2007-06-26 | Tokyo Electron Limited | Apparatus for measuring temperatures of a wafer using specular reflection spectroscopy |
Also Published As
Publication number | Publication date |
---|---|
WO1982001588A1 (en) | 1982-05-13 |
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