JPS5778636A - Spin coater - Google Patents

Spin coater

Info

Publication number
JPS5778636A
JPS5778636A JP15309680A JP15309680A JPS5778636A JP S5778636 A JPS5778636 A JP S5778636A JP 15309680 A JP15309680 A JP 15309680A JP 15309680 A JP15309680 A JP 15309680A JP S5778636 A JPS5778636 A JP S5778636A
Authority
JP
Japan
Prior art keywords
suction port
painting material
particles
magnetic
painted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15309680A
Other languages
English (en)
Inventor
Kinji Fukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15309680A priority Critical patent/JPS5778636A/ja
Publication of JPS5778636A publication Critical patent/JPS5778636A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/842—Coating a support with a liquid magnetic dispersion
JP15309680A 1980-10-31 1980-10-31 Spin coater Pending JPS5778636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15309680A JPS5778636A (en) 1980-10-31 1980-10-31 Spin coater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15309680A JPS5778636A (en) 1980-10-31 1980-10-31 Spin coater

Publications (1)

Publication Number Publication Date
JPS5778636A true JPS5778636A (en) 1982-05-17

Family

ID=15554878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15309680A Pending JPS5778636A (en) 1980-10-31 1980-10-31 Spin coater

Country Status (1)

Country Link
JP (1) JPS5778636A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013111561A (ja) * 2011-11-30 2013-06-10 Sokudo Co Ltd カップおよび基板処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4863709A (ja) * 1971-11-20 1973-09-04
JPS5036535A (ja) * 1973-08-06 1975-04-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4863709A (ja) * 1971-11-20 1973-09-04
JPS5036535A (ja) * 1973-08-06 1975-04-05

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013111561A (ja) * 2011-11-30 2013-06-10 Sokudo Co Ltd カップおよび基板処理装置
TWI581868B (zh) * 2011-11-30 2017-05-11 斯克林半導體科技有限公司 罩體與基板處理裝置
US10160012B2 (en) 2011-11-30 2018-12-25 Screen Semiconductor Solutions Co., Ltd. Cup and substrate processing apparatus

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