JPS5773026A - Apparatus for continuous plasma treatment - Google Patents

Apparatus for continuous plasma treatment

Info

Publication number
JPS5773026A
JPS5773026A JP14946280A JP14946280A JPS5773026A JP S5773026 A JPS5773026 A JP S5773026A JP 14946280 A JP14946280 A JP 14946280A JP 14946280 A JP14946280 A JP 14946280A JP S5773026 A JPS5773026 A JP S5773026A
Authority
JP
Japan
Prior art keywords
vacuum
plasma treatment
preliminary
sealing
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14946280A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0219138B2 (enrdf_load_stackoverflow
Inventor
Kiyoshi Imada
Susumu Ueno
Hideaki Kamata
Masaya Tokai
Yoshitada Hata
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP14946280A priority Critical patent/JPS5773026A/ja
Publication of JPS5773026A publication Critical patent/JPS5773026A/ja
Publication of JPH0219138B2 publication Critical patent/JPH0219138B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • ing And Chemical Polishing (AREA)
JP14946280A 1980-10-27 1980-10-27 Apparatus for continuous plasma treatment Granted JPS5773026A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14946280A JPS5773026A (en) 1980-10-27 1980-10-27 Apparatus for continuous plasma treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14946280A JPS5773026A (en) 1980-10-27 1980-10-27 Apparatus for continuous plasma treatment

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP23163489A Division JPH02258049A (ja) 1989-09-08 1989-09-08 真空処理装置用シール装置
JP6601791A Division JPH0686541B2 (ja) 1991-03-29 1991-03-29 真空処理装置

Publications (2)

Publication Number Publication Date
JPS5773026A true JPS5773026A (en) 1982-05-07
JPH0219138B2 JPH0219138B2 (enrdf_load_stackoverflow) 1990-04-27

Family

ID=15475649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14946280A Granted JPS5773026A (en) 1980-10-27 1980-10-27 Apparatus for continuous plasma treatment

Country Status (1)

Country Link
JP (1) JPS5773026A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5718737A (en) * 1980-06-21 1982-01-30 Shin Etsu Chem Co Ltd Apparatus for continuous plasma treatment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5718737A (en) * 1980-06-21 1982-01-30 Shin Etsu Chem Co Ltd Apparatus for continuous plasma treatment

Also Published As

Publication number Publication date
JPH0219138B2 (enrdf_load_stackoverflow) 1990-04-27

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