JPS5769747A - Wafer conveying device in liquid - Google Patents
Wafer conveying device in liquidInfo
- Publication number
- JPS5769747A JPS5769747A JP14433880A JP14433880A JPS5769747A JP S5769747 A JPS5769747 A JP S5769747A JP 14433880 A JP14433880 A JP 14433880A JP 14433880 A JP14433880 A JP 14433880A JP S5769747 A JPS5769747 A JP S5769747A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- conveying
- liquid
- hole
- conveying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
- H01L21/67787—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks with angular orientation of the workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Abstract
PURPOSE:To improve the conveying performance and durability of a wafer weight a simple configuration by arranging a hole floating a wafer under the wafer by a wafer conveying device in liquid and a hole for injecting for propelling it in a conveying direction along a conveying route. CONSTITUTION:A wafer conveying route 1 is formed in a channel structure, and a wafer floating bubble blowing hole 2 at both axial sides and wafer propelling fluid blowing hole 3 at the center are aligned along the conveying direction. The wafer in the liquid is floated by the air bubble upwardly from the hole 2, and is conveyed in the liquid spraying direction by the gas or liquid from the hole 3. In this manner, the conveying performance and the durability can be improved in the wafer conveying device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14433880A JPS5769747A (en) | 1980-10-17 | 1980-10-17 | Wafer conveying device in liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14433880A JPS5769747A (en) | 1980-10-17 | 1980-10-17 | Wafer conveying device in liquid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5769747A true JPS5769747A (en) | 1982-04-28 |
Family
ID=15359779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14433880A Pending JPS5769747A (en) | 1980-10-17 | 1980-10-17 | Wafer conveying device in liquid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5769747A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138235U (en) * | 1983-03-04 | 1984-09-14 | 株式会社不二越 | Silicon wafer transport equipment |
JPS6025141U (en) * | 1983-07-27 | 1985-02-20 | 富士通株式会社 | cleaning nozzle |
JPH02209317A (en) * | 1989-02-08 | 1990-08-20 | Toshiba Ceramics Co Ltd | Carrier device |
EP2947686A1 (en) * | 2014-05-19 | 2015-11-25 | Meyer Burger AG | Wafer processing method |
-
1980
- 1980-10-17 JP JP14433880A patent/JPS5769747A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138235U (en) * | 1983-03-04 | 1984-09-14 | 株式会社不二越 | Silicon wafer transport equipment |
JPS6025141U (en) * | 1983-07-27 | 1985-02-20 | 富士通株式会社 | cleaning nozzle |
JPH02209317A (en) * | 1989-02-08 | 1990-08-20 | Toshiba Ceramics Co Ltd | Carrier device |
EP2947686A1 (en) * | 2014-05-19 | 2015-11-25 | Meyer Burger AG | Wafer processing method |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6411560A (en) | Blood storage tank | |
MX171863B (en) | GAS-LIQUID TOWER STRUCTURE | |
DK166196C (en) | VIBRATION TRANSPORT SYSTEMS TO SAVE A VALUE MIXTURE | |
DE3664203D1 (en) | Fluid flow nozzle | |
JPS5769747A (en) | Wafer conveying device in liquid | |
GB913848A (en) | Fluid jet control devices | |
JPS55500508A (en) | ||
FR2820394B1 (en) | FLOATING PNEUMATIC DEVICE, IN PARTICULAR A PNEUMATIC SURFACE RAFT, EQUIPPED WITH INFLATION MEANS IN VENTURI | |
ES279886Y (en) | INJECTOR FOR THE INTRODUCTION OF A MIXTURE OF GAS AND LIQUID IN A FLOATING SYSTEM | |
FI924833A0 (en) | VATTENKRAFTSOMVANDLINGSSYSTEM | |
JPS5712139A (en) | Vibration-proof rubber | |
GB825068A (en) | Floating conveyor belt system | |
FR2371948A1 (en) | Gas-liquid contacting process - by injecting the gas into a liquid stream entering the top of column to create a stable foam | |
JPS57137222A (en) | Air track | |
FI814049L (en) | ANORDNING FOER ATT FOERHINDRA VAETSKEMEDRYCKNING VID EN KONTAKTKROPP FOER VAETSKA OCH GAS | |
JPS56118575A (en) | Power plant utilizing buoyancy | |
JPS5730700A (en) | Ventilation method of work space | |
JPS5790311A (en) | Conveyer | |
SU875283A1 (en) | Pneumatic anemometer | |
JPS5547875B2 (en) | ||
JPS5730597A (en) | Method and apparatus for aeration | |
GB1312741A (en) | Modular floating water cooling system | |
SU1498651A1 (en) | Cattle vehicle | |
JPS604297Y2 (en) | Flexible tape flotation device | |
JPS55123830A (en) | Attracting and transporting method for soft and thin article |