JPS59138235U

JPS59138235U - Silicon wafer transport equipment

Info

Publication number: JPS59138235U
Application number: JP3053483U
Authority: JP
Inventors: 大島　七郎
Original assignee: 株式会社不二越
Priority date: 1983-03-04
Filing date: 1983-03-04
Publication date: 1984-09-14

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図はこの考案の一実施例を模式的に示す縦断面図、
第２図は第１図の■−■線における拡大横断面図、第３
図は第１図の部分拡大図、第４図は第１図の部分拡大平
面図、第５図は樋の他の実施例の部分拡大横断面図であ
る。１・・・樋、２・・・凸条、３・・・シリコンウェーハ
、４・・・底面、５・・・噴出穴。FIG. 1 is a vertical sectional view schematically showing an embodiment of this invention;
Figure 2 is an enlarged cross-sectional view taken along the line ■-■ in Figure 1;
The figures are a partially enlarged view of FIG. 1, FIG. 4 is a partially enlarged plan view of FIG. 1, and FIG. 5 is a partially enlarged cross-sectional view of another embodiment of the gutter. 1... Gutter, 2... Convex strip, 3... Silicon wafer, 4... Bottom surface, 5... Spout hole.

Claims

[Scope of utility model registration request]

At the bottom of the gutter, a long convex strip with a smooth upper surface on which the silicon wafer is placed is provided along the longitudinal direction of the gutter, and the bottom surface of the gutter is made of a synthetic resin such as nylon. A silicon wafer transfer device that has multiple jet holes that eject water jets in the direction of silicon wafer transfer.