JPS5767807A - Measuring device for surface shape - Google Patents

Measuring device for surface shape

Info

Publication number
JPS5767807A
JPS5767807A JP14304880A JP14304880A JPS5767807A JP S5767807 A JPS5767807 A JP S5767807A JP 14304880 A JP14304880 A JP 14304880A JP 14304880 A JP14304880 A JP 14304880A JP S5767807 A JPS5767807 A JP S5767807A
Authority
JP
Japan
Prior art keywords
pulses
counter
measured
array
macroimage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14304880A
Other languages
Japanese (ja)
Inventor
Katsuyasu Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOUKIYOU SEIMITSU KK
Tokyo Seimitsu Co Ltd
Original Assignee
TOUKIYOU SEIMITSU KK
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOUKIYOU SEIMITSU KK, Tokyo Seimitsu Co Ltd filed Critical TOUKIYOU SEIMITSU KK
Priority to JP14304880A priority Critical patent/JPS5767807A/en
Publication of JPS5767807A publication Critical patent/JPS5767807A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Abstract

PURPOSE:To measure surface shapes, etc. with high accuracy by irradiating a microspot to the surface of an object to be measured, macro-forming the image thereof on a photodiode array via a lens system, and detecting the central position thereof. CONSTITUTION:The spot irradiated to the surface of an object to be measured is formed as a macroimage on a photodiode array 2 via a lens system. When a measurement start signal is outputted from a terminal 3, an FF4 and counters 7-9 are reset and the array 2 is scanned by the pulses of a clock pulse generator 1. At the same time, the counter 7, 9 start counting clock pulses via a gate circuit 5. When the scanning comes to the beginning end position of the macroimage, video pulses are outputted from the array 2, and the counter 7 is stopped by the FF4 and the circuit 5. The pulses are counted by the counter 8, and at every two pulses, one pulse is added to the counter 7, by which the central position of the macro-projected image is determined. Thereby, the surface shape and the like are measured with high accuracy.
JP14304880A 1980-10-15 1980-10-15 Measuring device for surface shape Pending JPS5767807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14304880A JPS5767807A (en) 1980-10-15 1980-10-15 Measuring device for surface shape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14304880A JPS5767807A (en) 1980-10-15 1980-10-15 Measuring device for surface shape

Publications (1)

Publication Number Publication Date
JPS5767807A true JPS5767807A (en) 1982-04-24

Family

ID=15329688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14304880A Pending JPS5767807A (en) 1980-10-15 1980-10-15 Measuring device for surface shape

Country Status (1)

Country Link
JP (1) JPS5767807A (en)

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