JPS5767273A - Precision fine adjustment unit - Google Patents

Precision fine adjustment unit

Info

Publication number
JPS5767273A
JPS5767273A JP55143891A JP14389180A JPS5767273A JP S5767273 A JPS5767273 A JP S5767273A JP 55143891 A JP55143891 A JP 55143891A JP 14389180 A JP14389180 A JP 14389180A JP S5767273 A JPS5767273 A JP S5767273A
Authority
JP
Japan
Prior art keywords
adjustment unit
fine adjustment
precision fine
stage
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55143891A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6130375B2 (OSRAM
Inventor
Tadao Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP55143891A priority Critical patent/JPS5767273A/ja
Publication of JPS5767273A publication Critical patent/JPS5767273A/ja
Publication of JPS6130375B2 publication Critical patent/JPS6130375B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Vibration Prevention Devices (AREA)
JP55143891A 1980-10-15 1980-10-15 Precision fine adjustment unit Granted JPS5767273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55143891A JPS5767273A (en) 1980-10-15 1980-10-15 Precision fine adjustment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55143891A JPS5767273A (en) 1980-10-15 1980-10-15 Precision fine adjustment unit

Publications (2)

Publication Number Publication Date
JPS5767273A true JPS5767273A (en) 1982-04-23
JPS6130375B2 JPS6130375B2 (OSRAM) 1986-07-12

Family

ID=15349436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55143891A Granted JPS5767273A (en) 1980-10-15 1980-10-15 Precision fine adjustment unit

Country Status (1)

Country Link
JP (1) JPS5767273A (OSRAM)

Also Published As

Publication number Publication date
JPS6130375B2 (OSRAM) 1986-07-12

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