JPS6130375B2 - - Google Patents

Info

Publication number
JPS6130375B2
JPS6130375B2 JP55143891A JP14389180A JPS6130375B2 JP S6130375 B2 JPS6130375 B2 JP S6130375B2 JP 55143891 A JP55143891 A JP 55143891A JP 14389180 A JP14389180 A JP 14389180A JP S6130375 B2 JPS6130375 B2 JP S6130375B2
Authority
JP
Japan
Prior art keywords
stage
axis
angle
reference axis
straight line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55143891A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5767273A (en
Inventor
Tadao Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP55143891A priority Critical patent/JPS5767273A/ja
Publication of JPS5767273A publication Critical patent/JPS5767273A/ja
Publication of JPS6130375B2 publication Critical patent/JPS6130375B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Vibration Prevention Devices (AREA)
JP55143891A 1980-10-15 1980-10-15 Precision fine adjustment unit Granted JPS5767273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55143891A JPS5767273A (en) 1980-10-15 1980-10-15 Precision fine adjustment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55143891A JPS5767273A (en) 1980-10-15 1980-10-15 Precision fine adjustment unit

Publications (2)

Publication Number Publication Date
JPS5767273A JPS5767273A (en) 1982-04-23
JPS6130375B2 true JPS6130375B2 (OSRAM) 1986-07-12

Family

ID=15349436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55143891A Granted JPS5767273A (en) 1980-10-15 1980-10-15 Precision fine adjustment unit

Country Status (1)

Country Link
JP (1) JPS5767273A (OSRAM)

Also Published As

Publication number Publication date
JPS5767273A (en) 1982-04-23

Similar Documents

Publication Publication Date Title
US4113223A (en) Cross-movable carriage
KR20020077332A (ko) 스캐너용 굴곡 어셈블리
EP0123693A1 (en) Planar biaxial micropositioning stage
KR101680784B1 (ko) 유연기구 메커니즘을 이용한 중공형 3축 평면운동 스테이지
EP0252745A2 (en) Relative displacement control apparatus
US10663040B2 (en) Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance
JPS6130375B2 (OSRAM)
US6188072B1 (en) Apparatus for extracting TEM specimens of semiconductor devices
JP2773777B2 (ja) アクチュエータユニットおよびそれを用いたレベル調整のできるステージ装置
US7732985B2 (en) Micro stage using piezoelectric element
DE10248849A1 (de) Vorrichtung zur Aufnahme eines Strahlteilerelements
US6681496B2 (en) Method of active fiber alignment with movable V-groove precision control microstructures
JP2652263B2 (ja) 物体移動装置
JP3275544B2 (ja) ステージ装置
Niesel et al. Micro-clamps for precise positioning of 120 silicon double mirrors in a MOEMS gyroscope
JPH05259263A (ja) Ｘｙ微動ステージ
JPS6017784Y2 (ja) 電子顕微鏡等における試料移動装置
US7249535B2 (en) Two-dimensional displacement apparatus
US3405979A (en) Vibration isolation
JP3430644B2 (ja) 座標測定機
KR102149410B1 (ko) 미세 이송기구 및 이를 포함하는 초정밀 포지셔닝 장치
JPH0432633Y2 (OSRAM)
JPH0232602B2 (OSRAM)
JPH0450693A (ja) 微動ステージ
JPH0560935A (ja) 光フアイバ光線入射位置調整装置