JPS5764928A - Carrying apparatus for photo mask or reticle - Google Patents

Carrying apparatus for photo mask or reticle

Info

Publication number
JPS5764928A
JPS5764928A JP55140332A JP14033280A JPS5764928A JP S5764928 A JPS5764928 A JP S5764928A JP 55140332 A JP55140332 A JP 55140332A JP 14033280 A JP14033280 A JP 14033280A JP S5764928 A JPS5764928 A JP S5764928A
Authority
JP
Japan
Prior art keywords
cassette
mask
cassettes
glass substrate
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55140332A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03782B2 (enrdf_load_stackoverflow
Inventor
Nobutoshi Abe
Yukio Kakizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP55140332A priority Critical patent/JPS5764928A/ja
Publication of JPS5764928A publication Critical patent/JPS5764928A/ja
Publication of JPH03782B2 publication Critical patent/JPH03782B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Warehouses Or Storage Devices (AREA)
JP55140332A 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle Granted JPS5764928A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55140332A JPS5764928A (en) 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55140332A JPS5764928A (en) 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63056285A Division JPS63265445A (ja) 1988-03-11 1988-03-11 基板の保管、搬送装置

Publications (2)

Publication Number Publication Date
JPS5764928A true JPS5764928A (en) 1982-04-20
JPH03782B2 JPH03782B2 (enrdf_load_stackoverflow) 1991-01-08

Family

ID=15266355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55140332A Granted JPS5764928A (en) 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle

Country Status (1)

Country Link
JP (1) JPS5764928A (enrdf_load_stackoverflow)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175740A (ja) * 1983-03-25 1984-10-04 Telmec Co Ltd ウエハ検出装置
JPS6169129A (ja) * 1984-09-13 1986-04-09 Canon Inc 原版自動交換装置
JPS6196458A (ja) * 1984-10-18 1986-05-15 Canon Inc 接触触質自給式超音波探傷走査装置
JPS62273727A (ja) * 1986-04-15 1987-11-27 ハンプシヤ−　インスツルメンツ，インコ−ポレ−テツド Ｘ線リソグラフイ装置及び処理方法
US4758127A (en) * 1983-06-24 1988-07-19 Canon Kabushiki Kaisha Original feeding apparatus and a cassette for containing the original
JPS63208414A (ja) * 1987-02-20 1988-08-29 Canon Inc 基板搬送装置
JPS63208452A (ja) * 1987-02-20 1988-08-29 Canon Inc 基板搬送装置
JPS63208430A (ja) * 1987-02-20 1988-08-29 Canon Inc 基板搬送装置
JPS63265445A (ja) * 1988-03-11 1988-11-01 Nikon Corp 基板の保管、搬送装置
NL8801268A (nl) * 1987-05-17 1988-12-16 Leitz Ernst Gmbh Behandelingsautomaat voor plaatvormige voorwerpen.
US4984953A (en) * 1987-02-20 1991-01-15 Canon Kabushiki Kaisha Plate-like article conveying system
US4999671A (en) * 1986-07-11 1991-03-12 Canon Kabushiki Kaisha Reticle conveying device
JPH04242953A (ja) * 1991-03-23 1992-08-31 Tokyo Electron Ltd ウエハ移送装置
US5330309A (en) * 1992-11-25 1994-07-19 Eastman Kodak Company Reader having cassette locating and unlatching mechanism
JPH06211308A (ja) * 1993-01-18 1994-08-02 Canon Inc 物品供給装置
US6113346A (en) * 1996-07-31 2000-09-05 Agfa Corporation Method for loading and unloading a supply of plates in an automated plate handler
US6352254B1 (en) * 1994-05-20 2002-03-05 Fujitsu Limited Paper sheet manipulating apparatus and paper sheet transaction apparatus
KR100665293B1 (ko) * 2006-01-04 2007-01-17 코리아테크노(주) 마스크 운송박스 박스커버 오프너
CN104142612A (zh) * 2013-05-08 2014-11-12 上海微电子装备有限公司 一种掩膜版回推机构

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4403387B2 (ja) 2004-04-26 2010-01-27 ソニー株式会社 固体撮像装置および固体撮像装置の駆動方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109760A (en) * 1978-02-16 1979-08-28 Toshiba Corp Carrier for semiconductor wafer
JPS5544927A (en) * 1978-09-27 1980-03-29 Toshiba Electric Equip Corp Smoke sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109760A (en) * 1978-02-16 1979-08-28 Toshiba Corp Carrier for semiconductor wafer
JPS5544927A (en) * 1978-09-27 1980-03-29 Toshiba Electric Equip Corp Smoke sensor

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175740A (ja) * 1983-03-25 1984-10-04 Telmec Co Ltd ウエハ検出装置
US4758127A (en) * 1983-06-24 1988-07-19 Canon Kabushiki Kaisha Original feeding apparatus and a cassette for containing the original
JPS6169129A (ja) * 1984-09-13 1986-04-09 Canon Inc 原版自動交換装置
JPS6196458A (ja) * 1984-10-18 1986-05-15 Canon Inc 接触触質自給式超音波探傷走査装置
JPS62273727A (ja) * 1986-04-15 1987-11-27 ハンプシヤ−　インスツルメンツ，インコ−ポレ−テツド Ｘ線リソグラフイ装置及び処理方法
US4999671A (en) * 1986-07-11 1991-03-12 Canon Kabushiki Kaisha Reticle conveying device
JPS63208414A (ja) * 1987-02-20 1988-08-29 Canon Inc 基板搬送装置
JPS63208452A (ja) * 1987-02-20 1988-08-29 Canon Inc 基板搬送装置
JPS63208430A (ja) * 1987-02-20 1988-08-29 Canon Inc 基板搬送装置
US4984953A (en) * 1987-02-20 1991-01-15 Canon Kabushiki Kaisha Plate-like article conveying system
NL8801268A (nl) * 1987-05-17 1988-12-16 Leitz Ernst Gmbh Behandelingsautomaat voor plaatvormige voorwerpen.
JPS63265445A (ja) * 1988-03-11 1988-11-01 Nikon Corp 基板の保管、搬送装置
JPH04242953A (ja) * 1991-03-23 1992-08-31 Tokyo Electron Ltd ウエハ移送装置
US5330309A (en) * 1992-11-25 1994-07-19 Eastman Kodak Company Reader having cassette locating and unlatching mechanism
JPH06211308A (ja) * 1993-01-18 1994-08-02 Canon Inc 物品供給装置
US6352254B1 (en) * 1994-05-20 2002-03-05 Fujitsu Limited Paper sheet manipulating apparatus and paper sheet transaction apparatus
US6113346A (en) * 1996-07-31 2000-09-05 Agfa Corporation Method for loading and unloading a supply of plates in an automated plate handler
KR100665293B1 (ko) * 2006-01-04 2007-01-17 코리아테크노(주) 마스크 운송박스 박스커버 오프너
CN104142612A (zh) * 2013-05-08 2014-11-12 上海微电子装备有限公司 一种掩膜版回推机构

Also Published As

Publication number Publication date
JPH03782B2 (enrdf_load_stackoverflow) 1991-01-08

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