JPS576225B2 - - Google Patents
Info
- Publication number
- JPS576225B2 JPS576225B2 JP1712173A JP1712173A JPS576225B2 JP S576225 B2 JPS576225 B2 JP S576225B2 JP 1712173 A JP1712173 A JP 1712173A JP 1712173 A JP1712173 A JP 1712173A JP S576225 B2 JPS576225 B2 JP S576225B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22597072A | 1972-02-14 | 1972-02-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4948273A JPS4948273A (en:Method) | 1974-05-10 |
| JPS576225B2 true JPS576225B2 (en:Method) | 1982-02-03 |
Family
ID=22847020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1712173A Expired JPS576225B2 (en:Method) | 1972-02-14 | 1973-02-13 |
Country Status (10)
| Country | Link |
|---|---|
| JP (1) | JPS576225B2 (en:Method) |
| AU (1) | AU470515B2 (en:Method) |
| CA (1) | CA976594A (en:Method) |
| DD (1) | DD103095A5 (en:Method) |
| DE (1) | DE2304906C2 (en:Method) |
| FR (1) | FR2172251B1 (en:Method) |
| GB (1) | GB1410262A (en:Method) |
| IT (1) | IT977180B (en:Method) |
| NL (1) | NL175676C (en:Method) |
| SE (1) | SE380673B (en:Method) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5425792B2 (en:Method) * | 1973-04-16 | 1979-08-30 | ||
| JPS5023571A (en:Method) * | 1973-06-29 | 1975-03-13 | ||
| JPS60192947A (ja) * | 1984-03-13 | 1985-10-01 | Mitsubishi Electric Corp | 半導体装置製造用フオトマスク材料 |
| US6683414B2 (en) * | 2001-10-25 | 2004-01-27 | Northrop Grumman Corporation | Ion-shielded focusing method for high-density electron beams generated by planar cold cathode electron emitters |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
-
1973
- 1973-01-18 CA CA161,598A patent/CA976594A/en not_active Expired
- 1973-01-29 DE DE19732304906 patent/DE2304906C2/de not_active Expired
- 1973-02-01 AU AU51673/73A patent/AU470515B2/en not_active Expired
- 1973-02-01 NL NL7301491A patent/NL175676C/xx not_active IP Right Cessation
- 1973-02-02 IT IT4803773A patent/IT977180B/it active
- 1973-02-07 FR FR7305243A patent/FR2172251B1/fr not_active Expired
- 1973-02-13 JP JP1712173A patent/JPS576225B2/ja not_active Expired
- 1973-02-13 SE SE7301997A patent/SE380673B/xx unknown
- 1973-02-14 GB GB734673A patent/GB1410262A/en not_active Expired
- 1973-02-14 DD DD16884873A patent/DD103095A5/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SE380673B (sv) | 1975-11-10 |
| AU5167373A (en) | 1974-08-01 |
| CA976594A (en) | 1975-10-21 |
| DE2304906A1 (de) | 1973-08-23 |
| IT977180B (it) | 1974-09-10 |
| GB1410262A (en) | 1975-10-15 |
| FR2172251B1 (en:Method) | 1978-05-26 |
| NL175676B (nl) | 1984-07-02 |
| DD103095A5 (en:Method) | 1974-01-05 |
| NL7301491A (en:Method) | 1973-08-16 |
| NL175676C (nl) | 1984-12-03 |
| FR2172251A1 (en:Method) | 1973-09-28 |
| DE2304906C2 (de) | 1985-10-24 |
| JPS4948273A (en:Method) | 1974-05-10 |
| AU470515B2 (en) | 1976-03-18 |