JPS5760877A - Fabrication of piezo-electric ceramic substrate - Google Patents

Fabrication of piezo-electric ceramic substrate

Info

Publication number
JPS5760877A
JPS5760877A JP55137199A JP13719980A JPS5760877A JP S5760877 A JPS5760877 A JP S5760877A JP 55137199 A JP55137199 A JP 55137199A JP 13719980 A JP13719980 A JP 13719980A JP S5760877 A JPS5760877 A JP S5760877A
Authority
JP
Japan
Prior art keywords
ceramic substrate
piezo
fabrication
powder
baked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55137199A
Other languages
Japanese (ja)
Other versions
JPS6048115B2 (en
Inventor
Yoichi Okinaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP55137199A priority Critical patent/JPS6048115B2/en
Publication of JPS5760877A publication Critical patent/JPS5760877A/en
Publication of JPS6048115B2 publication Critical patent/JPS6048115B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead based oxides

Abstract

PURPOSE:To stabilize the fabrication of a piezoelectric ceramic substrate by a method wherein a green sheet of piezo-electric ceramics 30mu-300mu thick is laminated and baked by using ZrO2 powders with impurity of 95% or larger and with sizing of 2mu-7mu in particle diameter. CONSTITUTION:A green sheet is produced by adding an organic binder and a plastic agent to Pb(Mg1/3Nb2/3)O3-Pb TiO3-PbZrO3 powder, and then after cutting into a fixed shape, ZrO2 powder sized for 2mu-7mu particle diameter and having the impurity of 95% or larger as an inserting powder for reactive use is superimposed, and this chip is baked as determined. Thus, a ceramic substrate with thin plate, especially 100mu or less thick, is produced with high stability.
JP55137199A 1980-09-30 1980-09-30 Method of manufacturing piezoelectric ceramic substrate Expired JPS6048115B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55137199A JPS6048115B2 (en) 1980-09-30 1980-09-30 Method of manufacturing piezoelectric ceramic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55137199A JPS6048115B2 (en) 1980-09-30 1980-09-30 Method of manufacturing piezoelectric ceramic substrate

Publications (2)

Publication Number Publication Date
JPS5760877A true JPS5760877A (en) 1982-04-13
JPS6048115B2 JPS6048115B2 (en) 1985-10-25

Family

ID=15193102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55137199A Expired JPS6048115B2 (en) 1980-09-30 1980-09-30 Method of manufacturing piezoelectric ceramic substrate

Country Status (1)

Country Link
JP (1) JPS6048115B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7100254B2 (en) * 1998-02-18 2006-09-05 Sony Corporation Method of manufacturing an ink-jet printhead

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7100254B2 (en) * 1998-02-18 2006-09-05 Sony Corporation Method of manufacturing an ink-jet printhead

Also Published As

Publication number Publication date
JPS6048115B2 (en) 1985-10-25

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