JPS5760646A - Thermion emission type electron gun and control method - Google Patents

Thermion emission type electron gun and control method

Info

Publication number
JPS5760646A
JPS5760646A JP13455380A JP13455380A JPS5760646A JP S5760646 A JPS5760646 A JP S5760646A JP 13455380 A JP13455380 A JP 13455380A JP 13455380 A JP13455380 A JP 13455380A JP S5760646 A JPS5760646 A JP S5760646A
Authority
JP
Japan
Prior art keywords
heating power
thermal stability
base
control method
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13455380A
Other languages
Japanese (ja)
Inventor
Masaki Yamabe
Toshihiro Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13455380A priority Critical patent/JPS5760646A/en
Publication of JPS5760646A publication Critical patent/JPS5760646A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To facilifate the way of operation as well as to shorten the time required for the thermal stability from the start of the operation, by increasing the heating power at the start and applying the steady heating power after reaching the thermal stability. CONSTITUTION:A heating member 2 is provided around a cathode chip 1 while said member 2 is supported by a supporter 3 which is fixed to a base 4 and a connector or a pin 5 is provided on said base. The heating power is supplied from a heating power source 7 while a temperature detecting element 8 composed of a thermo-couple is provided in the proximity of the base of the supporter 3 and connected to a temperature detecting circuit 9 which is connected to a heating power source voltage control circuit 10 which is then connected to a heating power source 7. Consequently the thermal stability can be achieved quickly at the start of the operation resulting in the easiness of the way of operation.
JP13455380A 1980-09-27 1980-09-27 Thermion emission type electron gun and control method Pending JPS5760646A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13455380A JPS5760646A (en) 1980-09-27 1980-09-27 Thermion emission type electron gun and control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13455380A JPS5760646A (en) 1980-09-27 1980-09-27 Thermion emission type electron gun and control method

Publications (1)

Publication Number Publication Date
JPS5760646A true JPS5760646A (en) 1982-04-12

Family

ID=15131005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13455380A Pending JPS5760646A (en) 1980-09-27 1980-09-27 Thermion emission type electron gun and control method

Country Status (1)

Country Link
JP (1) JPS5760646A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107411A (en) * 1984-10-30 1986-05-26 Fuji Electric Co Ltd Static type reactive power compensating
JPS62110241A (en) * 1985-11-07 1987-05-21 Univ Osaka Probe current controlling method for electron microscope and device thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519782A (en) * 1978-07-31 1980-02-12 Toshiba Corp Electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519782A (en) * 1978-07-31 1980-02-12 Toshiba Corp Electron gun

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107411A (en) * 1984-10-30 1986-05-26 Fuji Electric Co Ltd Static type reactive power compensating
JPS62110241A (en) * 1985-11-07 1987-05-21 Univ Osaka Probe current controlling method for electron microscope and device thereof

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