JPS575864A - Vapor depositing method - Google Patents

Vapor depositing method

Info

Publication number
JPS575864A
JPS575864A JP7870280A JP7870280A JPS575864A JP S575864 A JPS575864 A JP S575864A JP 7870280 A JP7870280 A JP 7870280A JP 7870280 A JP7870280 A JP 7870280A JP S575864 A JPS575864 A JP S575864A
Authority
JP
Japan
Prior art keywords
temp
vapor deposition
vapor
boat
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7870280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6328984B2 (enrdf_load_stackoverflow
Inventor
Teruo Misumi
Tadaharu Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP7870280A priority Critical patent/JPS575864A/ja
Publication of JPS575864A publication Critical patent/JPS575864A/ja
Publication of JPS6328984B2 publication Critical patent/JPS6328984B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP7870280A 1980-06-11 1980-06-11 Vapor depositing method Granted JPS575864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7870280A JPS575864A (en) 1980-06-11 1980-06-11 Vapor depositing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7870280A JPS575864A (en) 1980-06-11 1980-06-11 Vapor depositing method

Publications (2)

Publication Number Publication Date
JPS575864A true JPS575864A (en) 1982-01-12
JPS6328984B2 JPS6328984B2 (enrdf_load_stackoverflow) 1988-06-10

Family

ID=13669194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7870280A Granted JPS575864A (en) 1980-06-11 1980-06-11 Vapor depositing method

Country Status (1)

Country Link
JP (1) JPS575864A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0343237A (ja) * 1989-07-12 1991-02-25 Yuuc Sangyo Kk 耐圧合成樹脂管及びその製造方法

Also Published As

Publication number Publication date
JPS6328984B2 (enrdf_load_stackoverflow) 1988-06-10

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