JPS5758435U - - Google Patents
Info
- Publication number
- JPS5758435U JPS5758435U JP13326780U JP13326780U JPS5758435U JP S5758435 U JPS5758435 U JP S5758435U JP 13326780 U JP13326780 U JP 13326780U JP 13326780 U JP13326780 U JP 13326780U JP S5758435 U JPS5758435 U JP S5758435U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980133267U JPS6327784Y2 (en:Method) | 1980-09-19 | 1980-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980133267U JPS6327784Y2 (en:Method) | 1980-09-19 | 1980-09-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5758435U true JPS5758435U (en:Method) | 1982-04-06 |
| JPS6327784Y2 JPS6327784Y2 (en:Method) | 1988-07-27 |
Family
ID=29493492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980133267U Expired JPS6327784Y2 (en:Method) | 1980-09-19 | 1980-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6327784Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002100605A (ja) * | 2000-07-19 | 2002-04-05 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093775A (en:Method) * | 1973-12-19 | 1975-07-26 | ||
| JPS53144265A (en) * | 1977-05-23 | 1978-12-15 | Hitachi Ltd | Etching device |
| JPS5433676A (en) * | 1977-08-22 | 1979-03-12 | Hitachi Ltd | Wafer processing unit |
| JPS5529579A (en) * | 1979-08-16 | 1980-03-01 | Denki Kagaku Kogyo Kk | Polymerization of vinyl chloride |
-
1980
- 1980-09-19 JP JP1980133267U patent/JPS6327784Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093775A (en:Method) * | 1973-12-19 | 1975-07-26 | ||
| JPS53144265A (en) * | 1977-05-23 | 1978-12-15 | Hitachi Ltd | Etching device |
| JPS5433676A (en) * | 1977-08-22 | 1979-03-12 | Hitachi Ltd | Wafer processing unit |
| JPS5529579A (en) * | 1979-08-16 | 1980-03-01 | Denki Kagaku Kogyo Kk | Polymerization of vinyl chloride |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002100605A (ja) * | 2000-07-19 | 2002-04-05 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6327784Y2 (en:Method) | 1988-07-27 |