JPS5757870A - Dustproof net for vapor deposition device - Google Patents

Dustproof net for vapor deposition device

Info

Publication number
JPS5757870A
JPS5757870A JP13259580A JP13259580A JPS5757870A JP S5757870 A JPS5757870 A JP S5757870A JP 13259580 A JP13259580 A JP 13259580A JP 13259580 A JP13259580 A JP 13259580A JP S5757870 A JPS5757870 A JP S5757870A
Authority
JP
Japan
Prior art keywords
vapor deposition
net
plate
air flow
scum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13259580A
Other languages
English (en)
Inventor
Akira Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Original Assignee
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Holdings Co Ltd, Citizen Watch Co Ltd filed Critical Citizen Holdings Co Ltd
Priority to JP13259580A priority Critical patent/JPS5757870A/ja
Publication of JPS5757870A publication Critical patent/JPS5757870A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP13259580A 1980-09-24 1980-09-24 Dustproof net for vapor deposition device Pending JPS5757870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13259580A JPS5757870A (en) 1980-09-24 1980-09-24 Dustproof net for vapor deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13259580A JPS5757870A (en) 1980-09-24 1980-09-24 Dustproof net for vapor deposition device

Publications (1)

Publication Number Publication Date
JPS5757870A true JPS5757870A (en) 1982-04-07

Family

ID=15085008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13259580A Pending JPS5757870A (en) 1980-09-24 1980-09-24 Dustproof net for vapor deposition device

Country Status (1)

Country Link
JP (1) JPS5757870A (ja)

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