JPS5752146A - Controlling method for wafer probe - Google Patents

Controlling method for wafer probe

Info

Publication number
JPS5752146A
JPS5752146A JP12755280A JP12755280A JPS5752146A JP S5752146 A JPS5752146 A JP S5752146A JP 12755280 A JP12755280 A JP 12755280A JP 12755280 A JP12755280 A JP 12755280A JP S5752146 A JPS5752146 A JP S5752146A
Authority
JP
Japan
Prior art keywords
test
probe body
wafer
wafer probe
external tester
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12755280A
Other languages
English (en)
Inventor
Tomihito Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12755280A priority Critical patent/JPS5752146A/ja
Publication of JPS5752146A publication Critical patent/JPS5752146A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12755280A 1980-09-12 1980-09-12 Controlling method for wafer probe Pending JPS5752146A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12755280A JPS5752146A (en) 1980-09-12 1980-09-12 Controlling method for wafer probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12755280A JPS5752146A (en) 1980-09-12 1980-09-12 Controlling method for wafer probe

Publications (1)

Publication Number Publication Date
JPS5752146A true JPS5752146A (en) 1982-03-27

Family

ID=14962825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12755280A Pending JPS5752146A (en) 1980-09-12 1980-09-12 Controlling method for wafer probe

Country Status (1)

Country Link
JP (1) JPS5752146A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59174275A (ja) * 1983-03-23 1984-10-02 Sumitomo Metal Ind Ltd 金属材の溶削手入装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59174275A (ja) * 1983-03-23 1984-10-02 Sumitomo Metal Ind Ltd 金属材の溶削手入装置
JPH0448547B2 (ja) * 1983-03-23 1992-08-07 Sumitomo Metal Ind

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