JPS5748338A - Reaction furnace - Google Patents

Reaction furnace

Info

Publication number
JPS5748338A
JPS5748338A JP12356480A JP12356480A JPS5748338A JP S5748338 A JPS5748338 A JP S5748338A JP 12356480 A JP12356480 A JP 12356480A JP 12356480 A JP12356480 A JP 12356480A JP S5748338 A JPS5748338 A JP S5748338A
Authority
JP
Japan
Prior art keywords
electric
work
destaticizing apparatus
destaticizing
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12356480A
Other languages
Japanese (ja)
Other versions
JPS6320169B2 (en
Inventor
Hiroyuki Iwashita
Takashi Aoyanagi
Mitsunobu Nishine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NITSUKAN DENSHI KK
Hitachi Ltd
Original Assignee
NITSUKAN DENSHI KK
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NITSUKAN DENSHI KK, Hitachi Ltd filed Critical NITSUKAN DENSHI KK
Priority to JP12356480A priority Critical patent/JPS5748338A/en
Publication of JPS5748338A publication Critical patent/JPS5748338A/en
Publication of JPS6320169B2 publication Critical patent/JPS6320169B2/ja
Granted legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PURPOSE: To prevent pollution of a work or the like and deterioration or reduction of work quality by a method wherein an electric destaticizing apparatus is provided to a reaction furnace and an ionized gas is sent to a space of a transfer passage in a work outlet and inlet of a reaction tube to remove electric charge of the work or the like.
CONSTITUTION: An electric destaticizing apparatus 12 is attached to a scavenger 9 of a reaction furnace and a nitrogen gas and air entered into the electric destaticizing apparatus 12 from a gas supply pipe 13 of said electric destaticizing apparatus 12 is ionized and the resultant ionized gas is sent into a supply port 10 of the scavenger 9 from the electric destaticizing apparatus 12. Thereby, when a wafer 4 is introduced into and discharged from a reaction chamber 7, because electric charge is dissipated from the wafter 4 or a jig 3 when they are passed through the ionized gas and they are introduced into the reaction chamber 7 in this condition, foreign matters in the reaction chamber 7 are hardly adhered to the wafer 4 and reduction of quality when heat treatment is carried out is not generated and a yield is not lowered.
COPYRIGHT: (C)1982,JPO&Japio
JP12356480A 1980-09-08 1980-09-08 Reaction furnace Granted JPS5748338A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12356480A JPS5748338A (en) 1980-09-08 1980-09-08 Reaction furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12356480A JPS5748338A (en) 1980-09-08 1980-09-08 Reaction furnace

Publications (2)

Publication Number Publication Date
JPS5748338A true JPS5748338A (en) 1982-03-19
JPS6320169B2 JPS6320169B2 (en) 1988-04-26

Family

ID=14863700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12356480A Granted JPS5748338A (en) 1980-09-08 1980-09-08 Reaction furnace

Country Status (1)

Country Link
JP (1) JPS5748338A (en)

Also Published As

Publication number Publication date
JPS6320169B2 (en) 1988-04-26

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