JPS5748274Y2 - - Google Patents
Info
- Publication number
- JPS5748274Y2 JPS5748274Y2 JP1977091893U JP9189377U JPS5748274Y2 JP S5748274 Y2 JPS5748274 Y2 JP S5748274Y2 JP 1977091893 U JP1977091893 U JP 1977091893U JP 9189377 U JP9189377 U JP 9189377U JP S5748274 Y2 JPS5748274 Y2 JP S5748274Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977091893U JPS5748274Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-07-11 | 1977-07-11 | |
| GB7826599A GB2000901B (en) | 1977-07-11 | 1978-06-09 | Specimen anticontamination device for use in an electron microscope |
| US05/917,288 US4179605A (en) | 1977-07-11 | 1978-06-20 | Cold trap for electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977091893U JPS5748274Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-07-11 | 1977-07-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5419656U JPS5419656U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-02-08 |
| JPS5748274Y2 true JPS5748274Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-10-22 |
Family
ID=14039232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977091893U Expired JPS5748274Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-07-11 | 1977-07-11 |
Country Status (3)
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7906633A (nl) * | 1979-09-05 | 1981-03-09 | Philips Nv | Anti-contaminatie diafragma voor elektronen- straalapparaat. |
| JPS58161235A (ja) * | 1982-03-19 | 1983-09-24 | Internatl Precision Inc | 走査型電子線装置 |
| DE3374490D1 (en) * | 1982-04-20 | 1987-12-17 | Univ Glasgow | Low temperature stage for microanalysis |
| DE3408459A1 (de) * | 1984-03-08 | 1985-09-19 | Karl 7298 Loßburg Hehl | Foerdervorrichtung an kunststoff-spritzgiessmaschine zum austragen der spritzlinge |
| EP0155700B1 (en) * | 1984-03-22 | 1990-01-31 | Nippon Telegraph And Telephone Corporation | Apparatus for quantitative secondary ion mass spectrometry |
| US6046457A (en) * | 1998-01-09 | 2000-04-04 | International Business Machines Corporation | Charged particle beam apparatus having anticontamination means |
| DE10344492B4 (de) | 2003-09-24 | 2006-09-07 | Carl Zeiss Nts Gmbh | Teilchenstrahlgerät |
| GB2424198A (en) * | 2005-03-16 | 2006-09-20 | Cambridge Magnetic Refrigerati | Cryogenic support |
| US20130256558A1 (en) * | 2012-03-29 | 2013-10-03 | Christian Dietl | Apparatus for contaminants being deposited thereon |
| WO2015041267A1 (ja) * | 2013-09-20 | 2015-03-26 | 株式会社日立ハイテクノロジーズ | アンチコンタミネーショントラップおよび真空応用装置 |
| EP3477679B1 (en) * | 2017-10-26 | 2025-01-08 | FEI Company | Improved cryogenic cell for mounting a specimen in a charged particle microscope |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3008044A (en) * | 1960-02-25 | 1961-11-07 | Gen Electric | Application of superconductivity in guiding charged particles |
| DE1202915B (de) * | 1963-09-09 | 1965-10-14 | Siemens Ag | An der Pumpe arbeitender Korpuskularstrahl-apparat, insbesondere Elektronenmikroskop, mit einer den Objekttraeger aufnehmenden und mit einer Tiefkuehlvorrichtung in Verbindung stehenden Objektpatrone |
| DE2307822C3 (de) * | 1973-02-16 | 1982-03-18 | Siemens AG, 1000 Berlin und 8000 München | Supraleitendes Linsensystem für Korpuskularstrahlung |
-
1977
- 1977-07-11 JP JP1977091893U patent/JPS5748274Y2/ja not_active Expired
-
1978
- 1978-06-09 GB GB7826599A patent/GB2000901B/en not_active Expired
- 1978-06-20 US US05/917,288 patent/US4179605A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| GB2000901B (en) | 1982-03-10 |
| US4179605A (en) | 1979-12-18 |
| GB2000901A (en) | 1979-01-17 |
| JPS5419656U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-02-08 |