JPS5745308B2 - - Google Patents
Info
- Publication number
- JPS5745308B2 JPS5745308B2 JP4219875A JP4219875A JPS5745308B2 JP S5745308 B2 JPS5745308 B2 JP S5745308B2 JP 4219875 A JP4219875 A JP 4219875A JP 4219875 A JP4219875 A JP 4219875A JP S5745308 B2 JPS5745308 B2 JP S5745308B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4219875A JPS51117136A (en) | 1975-04-09 | 1975-04-09 | Plasma etching process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4219875A JPS51117136A (en) | 1975-04-09 | 1975-04-09 | Plasma etching process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51117136A JPS51117136A (en) | 1976-10-15 |
| JPS5745308B2 true JPS5745308B2 (no) | 1982-09-27 |
Family
ID=12629299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4219875A Granted JPS51117136A (en) | 1975-04-09 | 1975-04-09 | Plasma etching process |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51117136A (no) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7607298A (nl) * | 1976-07-02 | 1978-01-04 | Philips Nv | Werkwijze voor het vervaardigen van een inrichting en inrichting vervaardigd volgens de werkwijze. |
| JPS54158183A (en) * | 1978-06-05 | 1979-12-13 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS56118355A (en) * | 1980-02-22 | 1981-09-17 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Preparation of semiconductor device |
| JPS5984529A (ja) * | 1982-11-08 | 1984-05-16 | Nippon Denso Co Ltd | パタ−ン形成方法 |
| JPS59165423A (ja) * | 1983-03-11 | 1984-09-18 | Comput Basic Mach Technol Res Assoc | 有機樹脂膜のテ−パ−エツチング方法 |
| JPS611028A (ja) * | 1984-05-18 | 1986-01-07 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS611027A (ja) * | 1984-05-18 | 1986-01-07 | Fujitsu Ltd | 半導体装置の製造方法 |
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1975
- 1975-04-09 JP JP4219875A patent/JPS51117136A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51117136A (en) | 1976-10-15 |