JPS5744842A - Device for analyzing specimen - Google Patents

Device for analyzing specimen

Info

Publication number
JPS5744842A
JPS5744842A JP55119496A JP11949680A JPS5744842A JP S5744842 A JPS5744842 A JP S5744842A JP 55119496 A JP55119496 A JP 55119496A JP 11949680 A JP11949680 A JP 11949680A JP S5744842 A JPS5744842 A JP S5744842A
Authority
JP
Japan
Prior art keywords
ray
filter
electron
esca
auger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55119496A
Other languages
Japanese (ja)
Inventor
Sumio Sasaki
Kenji Kojima
Masao Murota
Takashi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP55119496A priority Critical patent/JPS5744842A/en
Publication of JPS5744842A publication Critical patent/JPS5744842A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To perform Auger electron spectroscopy and electro spectronscopy for cheminal analysis (ESCA) with good operability in a simple structure by providing an X-ray transmitting window which blocks an electron beam so that it can be freely inserted and removed. CONSTITUTION:An X-ray transmitting filter 11 which blocks the elctron beam is provided between an anticathode 7 of an X-ray source which also serves as an electron beam source and a specimen 3 via a moving mechanism 12 so that the filter can be freely inserted and removed. When said filter 11 is inserted the ESCA electron spectroscopy utilizing the irradiation of the X-ray having a specified wavelength is perfomred. When the filter 11 is removed, the Auger electron spectroscopy utilizing the electron beam containing the X-ray is performed. Therefore, the Auger and ESCA electron spectroscopies can be selectively performed by the easy operation in the simple constitution utilizing a pair of the beam and ray sources.
JP55119496A 1980-08-29 1980-08-29 Device for analyzing specimen Pending JPS5744842A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55119496A JPS5744842A (en) 1980-08-29 1980-08-29 Device for analyzing specimen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55119496A JPS5744842A (en) 1980-08-29 1980-08-29 Device for analyzing specimen

Publications (1)

Publication Number Publication Date
JPS5744842A true JPS5744842A (en) 1982-03-13

Family

ID=14762697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55119496A Pending JPS5744842A (en) 1980-08-29 1980-08-29 Device for analyzing specimen

Country Status (1)

Country Link
JP (1) JPS5744842A (en)

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