JPS5740843A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS5740843A
JPS5740843A JP11552180A JP11552180A JPS5740843A JP S5740843 A JPS5740843 A JP S5740843A JP 11552180 A JP11552180 A JP 11552180A JP 11552180 A JP11552180 A JP 11552180A JP S5740843 A JPS5740843 A JP S5740843A
Authority
JP
Japan
Prior art keywords
input terminal
sample
incident
electron beam
beam current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11552180A
Other languages
Japanese (ja)
Inventor
Toshikazu Honda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP11552180A priority Critical patent/JPS5740843A/en
Publication of JPS5740843A publication Critical patent/JPS5740843A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To quantitatively know the degree of damage of a sample by integrating the electron beam current which is incident on a phosphor plate from the sample move stop time and displaying its integration value. CONSTITUTION:An integration circuit 16 for integrating the electron beam current that is incident on a phosphor screen 7 when an electron microscope is operated and observes a sample has an input terminal IN, output terminal OUT, integration start command input terminal, weight input terminal, clear command signal input terminal, and integration value hold command signal input terminal. The circuit integrates the electron beam current I which is incident on a phosphor plate 7 when a start signal S1 is sent from a drive circuit 12 and a magnification signal S2 indicating the observation magnification at the time when it is removed from a power source 8 by applying weight depending upon the coefficient k which is obtained by converting them by means of a conversion circuit 17 and sends the output to an observation indicator 19 and a film baking indicator 20 through an A/D converter 18. As a result, the degree of damage of the sample can be quantitatively known.
JP11552180A 1980-08-22 1980-08-22 Electron microscope Pending JPS5740843A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11552180A JPS5740843A (en) 1980-08-22 1980-08-22 Electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11552180A JPS5740843A (en) 1980-08-22 1980-08-22 Electron microscope

Publications (1)

Publication Number Publication Date
JPS5740843A true JPS5740843A (en) 1982-03-06

Family

ID=14664578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11552180A Pending JPS5740843A (en) 1980-08-22 1980-08-22 Electron microscope

Country Status (1)

Country Link
JP (1) JPS5740843A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0758140A2 (en) * 1995-08-07 1997-02-12 Hitachi, Ltd. Electron microscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330865A (en) * 1976-09-03 1978-03-23 Hitachi Ltd Electron microscope provided with sample irradiating electron beam quantity measuring unit
JPS5362978A (en) * 1976-11-17 1978-06-05 Hitachi Ltd Electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330865A (en) * 1976-09-03 1978-03-23 Hitachi Ltd Electron microscope provided with sample irradiating electron beam quantity measuring unit
JPS5362978A (en) * 1976-11-17 1978-06-05 Hitachi Ltd Electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0758140A2 (en) * 1995-08-07 1997-02-12 Hitachi, Ltd. Electron microscope
EP0758140A3 (en) * 1995-08-07 1997-11-05 Hitachi, Ltd. Electron microscope
US5912462A (en) * 1995-08-07 1999-06-15 Hitachi, Ltd. Electron microscope

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