JPS5739512B2 - - Google Patents
Info
- Publication number
- JPS5739512B2 JPS5739512B2 JP51071275A JP7127576A JPS5739512B2 JP S5739512 B2 JPS5739512 B2 JP S5739512B2 JP 51071275 A JP51071275 A JP 51071275A JP 7127576 A JP7127576 A JP 7127576A JP S5739512 B2 JPS5739512 B2 JP S5739512B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/08—Protective coverings for parts of machine tools; Splash guards
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/592,152 US4042119A (en) | 1975-06-30 | 1975-06-30 | Workpiece positioning apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS526084A JPS526084A (en) | 1977-01-18 |
| JPS5739512B2 true JPS5739512B2 (US06815460-20041109-C00097.png) | 1982-08-21 |
Family
ID=24369520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51071275A Granted JPS526084A (en) | 1975-06-30 | 1976-06-18 | Device for positioning specimen |
Country Status (7)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61188524U (US06815460-20041109-C00097.png) * | 1985-05-17 | 1986-11-25 |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4141456A (en) * | 1976-08-30 | 1979-02-27 | Rca Corp. | Apparatus and method for aligning wafers |
| JPS583298Y2 (ja) * | 1977-10-11 | 1983-01-20 | 富士通株式会社 | 電子ビ−ム露光用基板ホルダ− |
| JPS5844144U (ja) * | 1981-09-16 | 1983-03-24 | 日本精工株式会社 | Ｘｙテ−ブルの接続機構 |
| JPS59129633A (ja) * | 1983-01-08 | 1984-07-26 | Canon Inc | ステージ装置 |
| JPS6035294U (ja) * | 1983-08-18 | 1985-03-11 | セイコーインスツルメンツ株式会社 | Ｘｙ試料台装置 |
| US4818169A (en) * | 1985-05-17 | 1989-04-04 | Schram Richard R | Automated wafer inspection system |
| DE3620969A1 (de) * | 1985-06-24 | 1987-01-02 | Canon Kk | Praezisionszufuehrmechanismus |
| JPH01169394A (ja) * | 1987-12-25 | 1989-07-04 | Hitachi Ltd | 真空容器用ｘｙステージ |
| JP2960423B2 (ja) * | 1988-11-16 | 1999-10-06 | 株式会社日立製作所 | 試料移動装置及び半導体製造装置 |
| US6313649B2 (en) | 1992-06-11 | 2001-11-06 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US6380751B2 (en) | 1992-06-11 | 2002-04-30 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US5345170A (en) | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
| US5561377A (en) | 1995-04-14 | 1996-10-01 | Cascade Microtech, Inc. | System for evaluating probing networks |
| US6002263A (en) | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
| US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
| US6836135B2 (en) | 2001-08-31 | 2004-12-28 | Cascade Microtech, Inc. | Optical testing device |
| US6777964B2 (en) | 2002-01-25 | 2004-08-17 | Cascade Microtech, Inc. | Probe station |
| US6847219B1 (en) | 2002-11-08 | 2005-01-25 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
| US7250779B2 (en) | 2002-11-25 | 2007-07-31 | Cascade Microtech, Inc. | Probe station with low inductance path |
| US6861856B2 (en) | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
| US7221172B2 (en) | 2003-05-06 | 2007-05-22 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
| US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
| JP2008502167A (ja) | 2004-06-07 | 2008-01-24 | カスケード マイクロテック インコーポレイテッド | 熱光学チャック |
| US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| DE102005045680A1 (de) * | 2005-09-24 | 2007-04-05 | Edmund Uschkurat | Vorrichtung zum Ausrichten eines Gegenstandes |
| US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
| US8235367B2 (en) * | 2009-06-10 | 2012-08-07 | Seagate Technology Llc | Selectively positioning a workpiece |
| JP6456768B2 (ja) * | 2015-05-18 | 2019-01-23 | 株式会社ディスコ | 加工装置 |
| DE102017102653A1 (de) | 2017-02-10 | 2018-08-16 | Schunk Gmbh & Co. Kg Spann- Und Greiftechnik | Stabkinematik |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2756857A (en) * | 1951-05-16 | 1956-07-31 | Willard H Mccorkle | Positioning device |
| FR1187997A (fr) * | 1959-01-20 | 1959-09-17 | Commissariat Energie Atomique | Télémanipulateur à transmission magnétique pour manipulation à l'intérieur d'enceintes étanches |
| US3517624A (en) * | 1968-04-29 | 1970-06-30 | Texas Instruments Inc | Movable table surface and means of positioning same |
| US3525140A (en) * | 1968-05-22 | 1970-08-25 | Ibm | Micro-motion device |
| US3733484A (en) * | 1969-10-29 | 1973-05-15 | Walter C Mc Crone Associates I | Control for electron microprobe |
| US3779400A (en) * | 1972-02-14 | 1973-12-18 | Univ Iowa State Res Found Inc | Micromanipulator system |
| FR2202759B1 (US06815460-20041109-C00097.png) * | 1972-10-13 | 1980-02-15 | Thomson Csf | |
| FR2206542B1 (US06815460-20041109-C00097.png) * | 1972-11-15 | 1976-10-29 | Thomson Csf | |
| DE2415186C3 (de) * | 1974-03-29 | 1979-04-12 | Deutsche Forschungs- Und Versuchsanstalt Fuer Luft- Und Raumfahrt E.V., 5300 Bonn | Kreuztisch für Manipulationen |
-
1975
- 1975-06-30 US US05/592,152 patent/US4042119A/en not_active Expired - Lifetime
-
1976
- 1976-05-17 FR FR7615566A patent/FR2316042A1/fr active Granted
- 1976-06-09 GB GB23766/76A patent/GB1506363A/en not_active Expired
- 1976-06-14 IT IT24249/76A patent/IT1063341B/it active
- 1976-06-18 JP JP51071275A patent/JPS526084A/ja active Granted
- 1976-06-18 CA CA255,238A patent/CA1037506A/en not_active Expired
- 1976-06-26 DE DE2628818A patent/DE2628818C2/de not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61188524U (US06815460-20041109-C00097.png) * | 1985-05-17 | 1986-11-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2316042A1 (fr) | 1977-01-28 |
| DE2628818A1 (de) | 1977-01-27 |
| IT1063341B (it) | 1985-02-11 |
| DE2628818C2 (de) | 1982-10-28 |
| JPS526084A (en) | 1977-01-18 |
| US4042119A (en) | 1977-08-16 |
| FR2316042B1 (US06815460-20041109-C00097.png) | 1978-08-25 |
| GB1506363A (en) | 1978-04-05 |
| CA1037506A (en) | 1978-08-29 |
