JPS5735768B2 - - Google Patents
Info
- Publication number
- JPS5735768B2 JPS5735768B2 JP5651677A JP5651677A JPS5735768B2 JP S5735768 B2 JPS5735768 B2 JP S5735768B2 JP 5651677 A JP5651677 A JP 5651677A JP 5651677 A JP5651677 A JP 5651677A JP S5735768 B2 JPS5735768 B2 JP S5735768B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US68746276A | 1976-05-18 | 1976-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52140355A JPS52140355A (en) | 1977-11-22 |
| JPS5735768B2 true JPS5735768B2 (de) | 1982-07-30 |
Family
ID=24760542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5651677A Granted JPS52140355A (en) | 1976-05-18 | 1977-05-18 | Method of measuring thickness of thin film |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS52140355A (de) |
| CA (1) | CA1086870A (de) |
| DE (1) | DE2721589A1 (de) |
| FR (1) | FR2393266A1 (de) |
| GB (1) | GB1561313A (de) |
| NL (1) | NL185306C (de) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI59489C (fi) * | 1978-11-21 | 1981-08-10 | Enso Gutzeit Oy | Foerfarande foer maetning av belaeggningsmaengder |
| JPS5758300U (de) * | 1980-09-22 | 1982-04-06 | ||
| DE3129049A1 (de) * | 1981-07-23 | 1983-02-24 | Hoesch Werke Ag, 4600 Dortmund | Verfahren und vorrichtung zur zerstoerungsfreien bestimmung der dicke der eisen-zinn-zwischenschicht an elektrolytisch verzinntem blech |
| JPS60140105A (ja) * | 1983-12-27 | 1985-07-25 | Shimadzu Corp | 多層膜分析装置 |
| JPS60142205A (ja) * | 1983-12-29 | 1985-07-27 | Shimadzu Corp | 多層膜分析装置 |
| DD278866A1 (de) * | 1987-11-20 | 1990-05-16 | Akad Wissenschaften Ddr | Verfahren zur phosphorgehaltsbestimmung in stromlos abgeschiedenen metallueberzuegen |
| JP3706989B2 (ja) * | 1999-04-07 | 2005-10-19 | 富士通株式会社 | 蛍光ｘ線を用いた膜厚測定方法 |
| JP4966160B2 (ja) * | 2007-10-26 | 2012-07-04 | シャープ株式会社 | 膜厚測定方法 |
| JP5494322B2 (ja) * | 2009-12-28 | 2014-05-14 | 株式会社デンソー | Ｃｎｔワイヤの製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4874864A (de) * | 1971-12-29 | 1973-10-09 | ||
| JPS4919222A (de) * | 1972-06-15 | 1974-02-20 |
-
1977
- 1977-04-27 CA CA277,086A patent/CA1086870A/en not_active Expired
- 1977-05-13 DE DE19772721589 patent/DE2721589A1/de not_active Ceased
- 1977-05-17 FR FR7715153A patent/FR2393266A1/fr active Granted
- 1977-05-17 NL NL7705443A patent/NL185306C/xx not_active IP Right Cessation
- 1977-05-18 GB GB2084877A patent/GB1561313A/en not_active Expired
- 1977-05-18 JP JP5651677A patent/JPS52140355A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4874864A (de) * | 1971-12-29 | 1973-10-09 | ||
| JPS4919222A (de) * | 1972-06-15 | 1974-02-20 |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7705443A (nl) | 1977-11-22 |
| NL185306B (nl) | 1989-10-02 |
| NL185306C (nl) | 1990-03-01 |
| JPS52140355A (en) | 1977-11-22 |
| FR2393266A1 (fr) | 1978-12-29 |
| DE2721589A1 (de) | 1977-12-01 |
| CA1086870A (en) | 1980-09-30 |
| GB1561313A (en) | 1980-02-20 |
| FR2393266B1 (de) | 1982-03-19 |