JPS5735336A - Reaction tube for heat treatment - Google Patents

Reaction tube for heat treatment

Info

Publication number
JPS5735336A
JPS5735336A JP11057980A JP11057980A JPS5735336A JP S5735336 A JPS5735336 A JP S5735336A JP 11057980 A JP11057980 A JP 11057980A JP 11057980 A JP11057980 A JP 11057980A JP S5735336 A JPS5735336 A JP S5735336A
Authority
JP
Japan
Prior art keywords
tube
ceramics
reaction tube
silica glass
main reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11057980A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222534B2 (enrdf_load_html_response
Inventor
Hideyasu Matsuo
Takayuki Shibuya
Kazunari Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP11057980A priority Critical patent/JPS5735336A/ja
Publication of JPS5735336A publication Critical patent/JPS5735336A/ja
Publication of JPH0222534B2 publication Critical patent/JPH0222534B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP11057980A 1980-08-12 1980-08-12 Reaction tube for heat treatment Granted JPS5735336A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11057980A JPS5735336A (en) 1980-08-12 1980-08-12 Reaction tube for heat treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11057980A JPS5735336A (en) 1980-08-12 1980-08-12 Reaction tube for heat treatment

Publications (2)

Publication Number Publication Date
JPS5735336A true JPS5735336A (en) 1982-02-25
JPH0222534B2 JPH0222534B2 (enrdf_load_html_response) 1990-05-18

Family

ID=14539408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11057980A Granted JPS5735336A (en) 1980-08-12 1980-08-12 Reaction tube for heat treatment

Country Status (1)

Country Link
JP (1) JPS5735336A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252435U (enrdf_load_html_response) * 1988-10-11 1990-04-16

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102408539A (zh) * 2011-10-24 2012-04-11 哈尔滨工业大学 一种形状记忆聚氨酯及其制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252435U (enrdf_load_html_response) * 1988-10-11 1990-04-16

Also Published As

Publication number Publication date
JPH0222534B2 (enrdf_load_html_response) 1990-05-18

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