JPS5734698A - High speed shutter unit for neutral particle incident device - Google Patents

High speed shutter unit for neutral particle incident device

Info

Publication number
JPS5734698A
JPS5734698A JP10875780A JP10875780A JPS5734698A JP S5734698 A JPS5734698 A JP S5734698A JP 10875780 A JP10875780 A JP 10875780A JP 10875780 A JP10875780 A JP 10875780A JP S5734698 A JPS5734698 A JP S5734698A
Authority
JP
Japan
Prior art keywords
high speed
shutter unit
neutral particle
speed shutter
incident device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10875780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6249720B2 (enExample
Inventor
Kouji Itou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP10875780A priority Critical patent/JPS5734698A/ja
Publication of JPS5734698A publication Critical patent/JPS5734698A/ja
Publication of JPS6249720B2 publication Critical patent/JPS6249720B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP10875780A 1980-08-07 1980-08-07 High speed shutter unit for neutral particle incident device Granted JPS5734698A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10875780A JPS5734698A (en) 1980-08-07 1980-08-07 High speed shutter unit for neutral particle incident device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10875780A JPS5734698A (en) 1980-08-07 1980-08-07 High speed shutter unit for neutral particle incident device

Publications (2)

Publication Number Publication Date
JPS5734698A true JPS5734698A (en) 1982-02-25
JPS6249720B2 JPS6249720B2 (enExample) 1987-10-21

Family

ID=14492727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10875780A Granted JPS5734698A (en) 1980-08-07 1980-08-07 High speed shutter unit for neutral particle incident device

Country Status (1)

Country Link
JP (1) JPS5734698A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60230370A (ja) * 1984-04-25 1985-11-15 クロ−ネ　アクチエンゲゼルシヤフト ろう付け、ねじ止めおよび剥離を必要としないケ−ブル接続器具

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0485222U (enExample) * 1990-11-30 1992-07-24

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444198A (en) * 1977-09-12 1979-04-07 Mitsubishi Heavy Ind Ltd Shutter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444198A (en) * 1977-09-12 1979-04-07 Mitsubishi Heavy Ind Ltd Shutter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60230370A (ja) * 1984-04-25 1985-11-15 クロ−ネ　アクチエンゲゼルシヤフト ろう付け、ねじ止めおよび剥離を必要としないケ−ブル接続器具

Also Published As

Publication number Publication date
JPS6249720B2 (enExample) 1987-10-21

Similar Documents

Publication Publication Date Title
JPS57100573A (en) Camera device
JPS56103720A (en) Speed changing device
JPS57109910A (en) Optical device
JPS5753723A (en) Optical device
JPS576115A (en) Automatic free gap absorbing device
JPS57111527A (en) Two plane x-ray photographing device
JPS57106000A (en) Neutral particle incident device
JPS5767911A (en) Optical device
GB2088049B (en) Radiation-sensing device
JPS5734698A (en) High speed shutter unit for neutral particle incident device
JPS56142518A (en) Camera function control device
JPS5790900A (en) Neutral particle incident device ion source
JPS5750800A (en) High speed neutral particle device
JPS56159100A (en) High speed neutral particle incident device
JPS56147399A (en) Neutral particle incident device
JPS56112099A (en) Neutral particle incident device
JPS56159099A (en) Control device for neutral particle incident unit
JPS5771982A (en) High speed shutter driver
JPS5778800A (en) Ion source for netral particle incident device
JPS55105999A (en) Neutral particle incident device
JPS56165300A (en) High speed neutral particle unit
JPS57637A (en) Optical device
JPS54132342A (en) Shutter twoostage system dropping device
GB2094012B (en) Focal plane shutter
JPS55137700A (en) Neutral particle incident device