JPS5728686A - Working apparatus by charged particle beam - Google Patents

Working apparatus by charged particle beam

Info

Publication number
JPS5728686A
JPS5728686A JP10389080A JP10389080A JPS5728686A JP S5728686 A JPS5728686 A JP S5728686A JP 10389080 A JP10389080 A JP 10389080A JP 10389080 A JP10389080 A JP 10389080A JP S5728686 A JPS5728686 A JP S5728686A
Authority
JP
Japan
Prior art keywords
power source
acceleration
voltage
period
bias
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10389080A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0223973B2 (enrdf_load_html_response
Inventor
Asaki Takemoto
Eisuke Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp, Osaka Transformer Co Ltd filed Critical Daihen Corp
Priority to JP10389080A priority Critical patent/JPS5728686A/ja
Publication of JPS5728686A publication Critical patent/JPS5728686A/ja
Publication of JPH0223973B2 publication Critical patent/JPH0223973B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
JP10389080A 1980-07-28 1980-07-28 Working apparatus by charged particle beam Granted JPS5728686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10389080A JPS5728686A (en) 1980-07-28 1980-07-28 Working apparatus by charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10389080A JPS5728686A (en) 1980-07-28 1980-07-28 Working apparatus by charged particle beam

Publications (2)

Publication Number Publication Date
JPS5728686A true JPS5728686A (en) 1982-02-16
JPH0223973B2 JPH0223973B2 (enrdf_load_html_response) 1990-05-28

Family

ID=14366015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10389080A Granted JPS5728686A (en) 1980-07-28 1980-07-28 Working apparatus by charged particle beam

Country Status (1)

Country Link
JP (1) JPS5728686A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188043A (ja) * 1982-04-28 1983-11-02 Inoue Japax Res Inc ビ−ム加工装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913424A (enrdf_load_html_response) * 1972-06-02 1974-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913424A (enrdf_load_html_response) * 1972-06-02 1974-02-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188043A (ja) * 1982-04-28 1983-11-02 Inoue Japax Res Inc ビ−ム加工装置

Also Published As

Publication number Publication date
JPH0223973B2 (enrdf_load_html_response) 1990-05-28

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