JPS5728686A - Working apparatus by charged particle beam - Google Patents

Working apparatus by charged particle beam

Info

Publication number
JPS5728686A
JPS5728686A JP10389080A JP10389080A JPS5728686A JP S5728686 A JPS5728686 A JP S5728686A JP 10389080 A JP10389080 A JP 10389080A JP 10389080 A JP10389080 A JP 10389080A JP S5728686 A JPS5728686 A JP S5728686A
Authority
JP
Japan
Prior art keywords
power source
acceleration
voltage
period
bias
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10389080A
Other languages
Japanese (ja)
Other versions
JPH0223973B2 (en
Inventor
Asaki Takemoto
Eisuke Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp, Osaka Transformer Co Ltd filed Critical Daihen Corp
Priority to JP10389080A priority Critical patent/JPS5728686A/en
Publication of JPS5728686A publication Critical patent/JPS5728686A/en
Publication of JPH0223973B2 publication Critical patent/JPH0223973B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To eliminate a complicated DC power source and simplify the apparatus, by using an AC power source as the acceleration power source.
CONSTITUTION: An acceleration power source 8 is made of an AC power source, and, when the output of a bias power source 7 is a DC, electron beam are irradiated on a material to be worked 5 only for a period within which the output voltage of the acceleration power source 8 is determined by the voltage value of the bias power source 7 within a period of half-wave where the negative pole becomes a negative electric potential. The beam current is stopped during the period where the acceleration voltage becomes inverse polarity. The bias voltage is set as a phase controlled AC voltage, and, when this is adjusted against the phase of the acceleration voltage, the beam current can be continued for an optional connecting period. As mentioned above, by using an AC power source as the acceleration power source and eliminating a complicated DC power source, the apparatus is simplified. Moreover, when a power source which outputs an electric current which is proportional to the square root of the acceleration voltage, is used as a focusing power source, the focusing point can always be fixed constantly. When a bias power source which corresponds to the acceleration voltage is used, a beam current of an optional value and waveform can be obtained.
COPYRIGHT: (C)1982,JPO&Japio
JP10389080A 1980-07-28 1980-07-28 Working apparatus by charged particle beam Granted JPS5728686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10389080A JPS5728686A (en) 1980-07-28 1980-07-28 Working apparatus by charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10389080A JPS5728686A (en) 1980-07-28 1980-07-28 Working apparatus by charged particle beam

Publications (2)

Publication Number Publication Date
JPS5728686A true JPS5728686A (en) 1982-02-16
JPH0223973B2 JPH0223973B2 (en) 1990-05-28

Family

ID=14366015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10389080A Granted JPS5728686A (en) 1980-07-28 1980-07-28 Working apparatus by charged particle beam

Country Status (1)

Country Link
JP (1) JPS5728686A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188043A (en) * 1982-04-28 1983-11-02 Inoue Japax Res Inc Beam processing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913424A (en) * 1972-06-02 1974-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913424A (en) * 1972-06-02 1974-02-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188043A (en) * 1982-04-28 1983-11-02 Inoue Japax Res Inc Beam processing device
JPH0447422B2 (en) * 1982-04-28 1992-08-03 Inoue Japax Res

Also Published As

Publication number Publication date
JPH0223973B2 (en) 1990-05-28

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