JPS5728686A - Working apparatus by charged particle beam - Google Patents
Working apparatus by charged particle beamInfo
- Publication number
- JPS5728686A JPS5728686A JP10389080A JP10389080A JPS5728686A JP S5728686 A JPS5728686 A JP S5728686A JP 10389080 A JP10389080 A JP 10389080A JP 10389080 A JP10389080 A JP 10389080A JP S5728686 A JPS5728686 A JP S5728686A
- Authority
- JP
- Japan
- Prior art keywords
- power source
- acceleration
- voltage
- period
- bias
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To eliminate a complicated DC power source and simplify the apparatus, by using an AC power source as the acceleration power source.
CONSTITUTION: An acceleration power source 8 is made of an AC power source, and, when the output of a bias power source 7 is a DC, electron beam are irradiated on a material to be worked 5 only for a period within which the output voltage of the acceleration power source 8 is determined by the voltage value of the bias power source 7 within a period of half-wave where the negative pole becomes a negative electric potential. The beam current is stopped during the period where the acceleration voltage becomes inverse polarity. The bias voltage is set as a phase controlled AC voltage, and, when this is adjusted against the phase of the acceleration voltage, the beam current can be continued for an optional connecting period. As mentioned above, by using an AC power source as the acceleration power source and eliminating a complicated DC power source, the apparatus is simplified. Moreover, when a power source which outputs an electric current which is proportional to the square root of the acceleration voltage, is used as a focusing power source, the focusing point can always be fixed constantly. When a bias power source which corresponds to the acceleration voltage is used, a beam current of an optional value and waveform can be obtained.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10389080A JPS5728686A (en) | 1980-07-28 | 1980-07-28 | Working apparatus by charged particle beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10389080A JPS5728686A (en) | 1980-07-28 | 1980-07-28 | Working apparatus by charged particle beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5728686A true JPS5728686A (en) | 1982-02-16 |
JPH0223973B2 JPH0223973B2 (en) | 1990-05-28 |
Family
ID=14366015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10389080A Granted JPS5728686A (en) | 1980-07-28 | 1980-07-28 | Working apparatus by charged particle beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5728686A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58188043A (en) * | 1982-04-28 | 1983-11-02 | Inoue Japax Res Inc | Beam processing device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4913424A (en) * | 1972-06-02 | 1974-02-05 |
-
1980
- 1980-07-28 JP JP10389080A patent/JPS5728686A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4913424A (en) * | 1972-06-02 | 1974-02-05 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58188043A (en) * | 1982-04-28 | 1983-11-02 | Inoue Japax Res Inc | Beam processing device |
JPH0447422B2 (en) * | 1982-04-28 | 1992-08-03 | Inoue Japax Res |
Also Published As
Publication number | Publication date |
---|---|
JPH0223973B2 (en) | 1990-05-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE9525T1 (en) | METHOD OF REGULATION OF THE POWER SUPPLY OF A DIRECT CURRENT MOTOR AND DEVICE FOR ITS IMPLEMENTATION. | |
JPS57206125A (en) | Hysteresis circuit | |
JPS5728686A (en) | Working apparatus by charged particle beam | |
JPS54156546A (en) | Corona charger | |
JPS5629260A (en) | Corona charging method in electrophotography or the like | |
JPS5719188A (en) | Voltage compensating circuit for resistance welding machine | |
JPS53144440A (en) | Charged particle bram apparatus | |
JPS5228632A (en) | Non-failure power source | |
JPS5695351A (en) | Electrical dust collector | |
JPS5459696A (en) | Electric discharge machining method | |
JPS541825A (en) | Self-excited inverter | |
JPS53141047A (en) | Generating method for bias voltage of discharger | |
JPS5463218A (en) | Controller of dc ac converting circuit | |
JPS6455375A (en) | Device for projecting ion beam | |
JPS545519A (en) | Voltage controller for ac generator | |
JPS5416345A (en) | Automatic welding method for holding constant arc length | |
SU578178A1 (en) | Electrochemical machining method | |
JPS54143062A (en) | Driving method for electron source | |
JPS53117335A (en) | Generating equipment for marker of displaying partially expansion range | |
JPS5436554A (en) | Controlling method of power converter | |
JPS5546421A (en) | Mass spectrometer | |
JPS5234199A (en) | Electric power source for charged beam | |
JPS56110494A (en) | Controller for direct current motor | |
JPS5519480A (en) | Charged particle beam machining device | |
JPS5439684A (en) | Control apparatus of charged particle probe diameters |