JPS5727550A - Electron lens - Google Patents
Electron lensInfo
- Publication number
- JPS5727550A JPS5727550A JP10209080A JP10209080A JPS5727550A JP S5727550 A JPS5727550 A JP S5727550A JP 10209080 A JP10209080 A JP 10209080A JP 10209080 A JP10209080 A JP 10209080A JP S5727550 A JPS5727550 A JP S5727550A
- Authority
- JP
- Japan
- Prior art keywords
- theta3
- reduced
- magnetic
- magnetic poles
- distortion aberration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/143—Permanent magnetic lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10209080A JPS5727550A (en) | 1980-07-25 | 1980-07-25 | Electron lens |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10209080A JPS5727550A (en) | 1980-07-25 | 1980-07-25 | Electron lens |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5727550A true JPS5727550A (en) | 1982-02-13 |
JPS6329783B2 JPS6329783B2 (ja) | 1988-06-15 |
Family
ID=14318070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10209080A Granted JPS5727550A (en) | 1980-07-25 | 1980-07-25 | Electron lens |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5727550A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS526073A (en) * | 1975-07-04 | 1977-01-18 | Hitachi Ltd | Magnetic field type electronic lens |
-
1980
- 1980-07-25 JP JP10209080A patent/JPS5727550A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS526073A (en) * | 1975-07-04 | 1977-01-18 | Hitachi Ltd | Magnetic field type electronic lens |
Also Published As
Publication number | Publication date |
---|---|
JPS6329783B2 (ja) | 1988-06-15 |
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