JPS57211613A - Vacuum pressure controller - Google Patents
Vacuum pressure controllerInfo
- Publication number
- JPS57211613A JPS57211613A JP9527781A JP9527781A JPS57211613A JP S57211613 A JPS57211613 A JP S57211613A JP 9527781 A JP9527781 A JP 9527781A JP 9527781 A JP9527781 A JP 9527781A JP S57211613 A JPS57211613 A JP S57211613A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pressure
- voltage
- operated
- motor
- controlling valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/202—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means actuated by an electric motor
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Drying Of Semiconductors (AREA)
- Control Of Fluid Pressure (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE:To make the vacuum pressure control high-precision and stable and to accelerate the rise time, by driving a servomotor, which operates a vacuum pressure controlling valve, intermittently at time intervals approximating the response speed. CONSTITUTION:A vacuum pump 3 sucks the gas in a chamber 2 through a vacuum pressure controlling valve 4, and the controlling valve 4 is operated through pole screw 6 by a servomotor 5. The vacuum pressure in the chamber 2 is measured by a sensor 7, and an analog voltage proportional to the vacuum pressure is inputted to a voltage comparing circuit 9. The voltage from the sensor 7 and the voltage from a target voltage generating volume 8 are compared with each other in the circuit 9, and the differential voltage is amplified by an amplifier 10 and is power-amplified through a relay contact 11 by a servo amplifier 12 and is supplied to the motor 5. The contact 11 is operated by a relay R14, and the R14 is operated by the charge voltage of a capacitor C17; and when the R14 is operated, contacts 11 and 13 are closed to rotate the motor in a high speed, and the electric charge of the C17 is discharged through a resistance 18, and the energization of the R14 is weakened to open contacts 11 and 13, and thus, the motor 5 is driven intermittently.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9527781A JPS57211613A (en) | 1981-06-22 | 1981-06-22 | Vacuum pressure controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9527781A JPS57211613A (en) | 1981-06-22 | 1981-06-22 | Vacuum pressure controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57211613A true JPS57211613A (en) | 1982-12-25 |
Family
ID=14133273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9527781A Pending JPS57211613A (en) | 1981-06-22 | 1981-06-22 | Vacuum pressure controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57211613A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0166991A2 (en) * | 1984-06-04 | 1986-01-08 | Nisshin Steel Co., Ltd. | Method of controlling deposition amount distribution in a vacuum deposition plating |
-
1981
- 1981-06-22 JP JP9527781A patent/JPS57211613A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0166991A2 (en) * | 1984-06-04 | 1986-01-08 | Nisshin Steel Co., Ltd. | Method of controlling deposition amount distribution in a vacuum deposition plating |
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