JPS57211504A - Observation member for talbot interferometer - Google Patents

Observation member for talbot interferometer

Info

Publication number
JPS57211504A
JPS57211504A JP9866881A JP9866881A JPS57211504A JP S57211504 A JPS57211504 A JP S57211504A JP 9866881 A JP9866881 A JP 9866881A JP 9866881 A JP9866881 A JP 9866881A JP S57211504 A JPS57211504 A JP S57211504A
Authority
JP
Japan
Prior art keywords
observation
interference fringes
diffraction grating
observation member
screen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9866881A
Other languages
English (en)
Other versions
JPH0311422B2 (ja
Inventor
Ryuichi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP9866881A priority Critical patent/JPS57211504A/ja
Publication of JPS57211504A publication Critical patent/JPS57211504A/ja
Publication of JPH0311422B2 publication Critical patent/JPH0311422B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP9866881A 1981-06-24 1981-06-24 Observation member for talbot interferometer Granted JPS57211504A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9866881A JPS57211504A (en) 1981-06-24 1981-06-24 Observation member for talbot interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9866881A JPS57211504A (en) 1981-06-24 1981-06-24 Observation member for talbot interferometer

Publications (2)

Publication Number Publication Date
JPS57211504A true JPS57211504A (en) 1982-12-25
JPH0311422B2 JPH0311422B2 (ja) 1991-02-15

Family

ID=14225887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9866881A Granted JPS57211504A (en) 1981-06-24 1981-06-24 Observation member for talbot interferometer

Country Status (1)

Country Link
JP (1) JPS57211504A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007527526A (ja) * 2003-11-14 2007-09-27 オフソニックス・インコーポレーテッド レンズメータ及び波面センサ及び収差測定方法
JP2010256059A (ja) * 2009-04-22 2010-11-11 Canon Inc トールボット干渉計、トールボット干渉計の調整方法、及び露光装置
JP2011106975A (ja) * 2009-11-18 2011-06-02 Canon Inc 屈折率分布の計測方法および計測装置
JP2011117897A (ja) * 2009-12-07 2011-06-16 Canon Inc 屈折率分布の計測方法および計測装置
CN106840608A (zh) * 2016-12-27 2017-06-13 中国科学院长春光学精密机械与物理研究所 一种检测和评价光源平行性的方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007527526A (ja) * 2003-11-14 2007-09-27 オフソニックス・インコーポレーテッド レンズメータ及び波面センサ及び収差測定方法
JP4832310B2 (ja) * 2003-11-14 2011-12-07 オフソニックス・インコーポレーテッド レンズメータ及び波面センサ及び収差測定方法
JP2010256059A (ja) * 2009-04-22 2010-11-11 Canon Inc トールボット干渉計、トールボット干渉計の調整方法、及び露光装置
JP2011106975A (ja) * 2009-11-18 2011-06-02 Canon Inc 屈折率分布の計測方法および計測装置
JP2011117897A (ja) * 2009-12-07 2011-06-16 Canon Inc 屈折率分布の計測方法および計測装置
CN106840608A (zh) * 2016-12-27 2017-06-13 中国科学院长春光学精密机械与物理研究所 一种检测和评价光源平行性的方法

Also Published As

Publication number Publication date
JPH0311422B2 (ja) 1991-02-15

Similar Documents

Publication Publication Date Title
JPS5762052A (en) Original plate to be projected for use in transmission
ATE4754T1 (de) Optische anordnung fuer einen rauchmelder nach dem lichtstreuungsprinzip.
ES8203523A1 (es) Perfeccionamientos en la fabricacion de pantallas autoilumi-nadas
JPS57211504A (en) Observation member for talbot interferometer
DE3572399D1 (en) Illumination device for the optical measurement of microbiological objects, especially by image analysis
GB1295018A (ja)
JPS5536785A (en) Scattered light type smoke sensor
FR2235354A1 (en) Photoelectric optical test sensor - measures displacement of a diffraction screen with constant spacing in the test sensor plane
JPS52127259A (en) Observing surface sharpe
JPS5744823A (en) Fourier spectroscope device
JPS6474414A (en) Optical displacement detector
JPS5572806A (en) Contour display unit
JPS54123085A (en) Spectrophotometer
JPS53115247A (en) Light intensity modulating and optical path changing device using prisms
JPS55119036A (en) Method of measuring lens array
JPS5245927A (en) Enlarger for color photography
JPS5299842A (en) Measurement of wavelength dispersion
JPS5461575A (en) Liquid crystal watch
JPS5647165A (en) Lighting device
JPS537391A (en) Measuring apparatus for reflection factor
JPS5536767A (en) Photometry device
JPS57108614A (en) Angle measuring device by using line sensor
JPS52137388A (en) Abnormality detector
JPS5310433A (en) Illuminating device for copying operation
JPS51117054A (en) Light diffusion plate