JPS57210626A - Position controlling system - Google Patents

Position controlling system

Info

Publication number
JPS57210626A
JPS57210626A JP56093810A JP9381081A JPS57210626A JP S57210626 A JPS57210626 A JP S57210626A JP 56093810 A JP56093810 A JP 56093810A JP 9381081 A JP9381081 A JP 9381081A JP S57210626 A JPS57210626 A JP S57210626A
Authority
JP
Japan
Prior art keywords
delta
coordinates
curvature
measurement
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56093810A
Other languages
Japanese (ja)
Inventor
Katsuhiko Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56093810A priority Critical patent/JPS57210626A/en
Publication of JPS57210626A publication Critical patent/JPS57210626A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Abstract

PURPOSE:To obtain correct coordinates, by estimating each mirror curvature in X and Y directions, establishing corrective oblique coordinates against the curvature thereafter, calculating cross coordinates against the oblique coordinates, and relating both coordinates. CONSTITUTION:Three cross patterns 6 are aligned in X-direction at center of measurement 5. There exists a curvature DELTA in the patterns 6 of the measurement 5. As there exists a curvature delta in a mirror 4, the results of measurement show a curvature of delta-DELTA. And, when the measurement 5 is rotated by 180 deg. and mounted, the curvature of patterns 6 of the measurement 5 becomes DELTA in reverse direction. The results of measurement show that of delta+DELTA. Two-fold of the mirror curvature delta can be calculated as a parameter of distance from an origin of coordination, by putting these measurement data together. Oblique coordinates are made after correcting the curvatures deltax(y) and deltay(x). As they have a right angle error theta against cross coordinates, the error is calculated through both coordinates and theta.
JP56093810A 1981-06-19 1981-06-19 Position controlling system Pending JPS57210626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56093810A JPS57210626A (en) 1981-06-19 1981-06-19 Position controlling system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56093810A JPS57210626A (en) 1981-06-19 1981-06-19 Position controlling system

Publications (1)

Publication Number Publication Date
JPS57210626A true JPS57210626A (en) 1982-12-24

Family

ID=14092751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56093810A Pending JPS57210626A (en) 1981-06-19 1981-06-19 Position controlling system

Country Status (1)

Country Link
JP (1) JPS57210626A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0684753A (en) * 1992-09-04 1994-03-25 Nikon Corp Exposing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0684753A (en) * 1992-09-04 1994-03-25 Nikon Corp Exposing method

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